@inproceedings{1c1188fe58ef4abfa506d81cebbf590e,
title = "Selectively self-assembled single-walled carbon nanotubes using only photolithography without additional chemical process",
abstract = "In this paper, we investigated a novel method of selectively assembling single-walled carbon nanotubes (SWCNTs) on a silicon (Si) substrate. These SWCNT arrays were fabricated by using only a photolithographic process. Using this technique, SWCNTs could be absorbed on the Si substrate surface without complicated chemical steps. As a result, we successfully fabricated SWCNT-based multi-channel patterns. The unmanageable SWCNTs could be easily absorbed on the Si0 2 surface. This is to advance one step further from the conventional self-assembled process using octadecyltrichlorosilane (OTS). This technique will provide a useful basis for the implementation of nanostructure-based field emission transistor (FET) devices. This new process can be used to fabricate SWCNT channels of FET devices.",
keywords = "Photolithography, SAM, SWCNT",
author = "Kim, {K. H.} and Kim, {T. G.} and S. Lee and Jhon, {Y. M.} and Kim, {S. H.} and Byun, {Y. T.}",
year = "2011",
doi = "10.1063/1.3666631",
language = "English",
isbn = "9780735410022",
series = "AIP Conference Proceedings",
pages = "825--826",
booktitle = "Physics of Semiconductors - 30th International Conference on the Physics of Semiconductors, ICPS-30",
note = "30th International Conference on the Physics of Semiconductors, ICPS-30 ; Conference date: 25-07-2010 Through 30-07-2010",
}