Self-catalytic growth of silicon nanowires on stainless steel

Myoung Ha Kim; Yong Hee Park; Ilsoo Kim; Tae Eon Park; Yun Mo Sung; Heon Jin Choi

doi:10.1016/j.matlet.2010.06.024

Self-catalytic growth of silicon nanowires on stainless steel

Myoung Ha Kim, Yong Hee Park, Ilsoo Kim, Tae Eon Park, Yun Mo Sung, Heon Jin Choi

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

Silicon nanowires were grown on a stainless steel substrate using a vapor-liquid-solid mechanism in self-catalytic mode. The multi-component Fe-Cr-Ni-Mn-Si catalyst that was formed from the substrate leads the growth of single-crystal Si nanowires with lengths of several micrometers and diameters ranging from 100 to 150 nm. A systematic investigation of the processing parameters revealed that the hydrogen flow rate is critical to the growth of the nanowires. At a high flow rate that exceeds 1000 sccm, the substrate is embrittled by H₂, and liquid droplets, which lead the growth of nanowires by the vapor-liquid-solid mechanism, are formed on the substrate. Electrical transport measurements indicated that the nanowires grown with the multi-component catalyst have electrical properties comparable to those grown by a single-component Ti catalyst.

Original language	English
Pages (from-to)	2306-2309
Number of pages	4
Journal	Materials Letters
Volume	64
Issue number	21
DOIs	https://doi.org/10.1016/j.matlet.2010.06.024
Publication status	Published - 2010 Nov 15

Bibliographical note

Funding Information:
This research was supported by a grant from the National Research Laboratory program ( R0A-2007-000-20075-0 ) and Pioneer Research Program for Converging Technology ( 2009-008-1529 ) through the Korea Science and Engineering Foundation funded by the Ministry of Education, Science & Technology, and Seoul Research and Business Development Program (10816).

Copyright:
Copyright 2011 Elsevier B.V., All rights reserved.

Keywords

Crystal growth
Nanomaterials
Semiconductors

ASJC Scopus subject areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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10.1016/j.matlet.2010.06.024

Cite this

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title = "Self-catalytic growth of silicon nanowires on stainless steel",

abstract = "Silicon nanowires were grown on a stainless steel substrate using a vapor-liquid-solid mechanism in self-catalytic mode. The multi-component Fe-Cr-Ni-Mn-Si catalyst that was formed from the substrate leads the growth of single-crystal Si nanowires with lengths of several micrometers and diameters ranging from 100 to 150 nm. A systematic investigation of the processing parameters revealed that the hydrogen flow rate is critical to the growth of the nanowires. At a high flow rate that exceeds 1000 sccm, the substrate is embrittled by H2, and liquid droplets, which lead the growth of nanowires by the vapor-liquid-solid mechanism, are formed on the substrate. Electrical transport measurements indicated that the nanowires grown with the multi-component catalyst have electrical properties comparable to those grown by a single-component Ti catalyst.",

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note = "Funding Information: This research was supported by a grant from the National Research Laboratory program ( R0A-2007-000-20075-0 ) and Pioneer Research Program for Converging Technology ( 2009-008-1529 ) through the Korea Science and Engineering Foundation funded by the Ministry of Education, Science & Technology, and Seoul Research and Business Development Program (10816). Copyright: Copyright 2011 Elsevier B.V., All rights reserved.",

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doi = "10.1016/j.matlet.2010.06.024",

language = "English",

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AU - Park, Yong Hee

AU - Kim, Ilsoo

AU - Park, Tae Eon

AU - Sung, Yun Mo

AU - Choi, Heon Jin

N1 - Funding Information: This research was supported by a grant from the National Research Laboratory program ( R0A-2007-000-20075-0 ) and Pioneer Research Program for Converging Technology ( 2009-008-1529 ) through the Korea Science and Engineering Foundation funded by the Ministry of Education, Science & Technology, and Seoul Research and Business Development Program (10816). Copyright: Copyright 2011 Elsevier B.V., All rights reserved.

PY - 2010/11/15

Y1 - 2010/11/15

N2 - Silicon nanowires were grown on a stainless steel substrate using a vapor-liquid-solid mechanism in self-catalytic mode. The multi-component Fe-Cr-Ni-Mn-Si catalyst that was formed from the substrate leads the growth of single-crystal Si nanowires with lengths of several micrometers and diameters ranging from 100 to 150 nm. A systematic investigation of the processing parameters revealed that the hydrogen flow rate is critical to the growth of the nanowires. At a high flow rate that exceeds 1000 sccm, the substrate is embrittled by H2, and liquid droplets, which lead the growth of nanowires by the vapor-liquid-solid mechanism, are formed on the substrate. Electrical transport measurements indicated that the nanowires grown with the multi-component catalyst have electrical properties comparable to those grown by a single-component Ti catalyst.

AB - Silicon nanowires were grown on a stainless steel substrate using a vapor-liquid-solid mechanism in self-catalytic mode. The multi-component Fe-Cr-Ni-Mn-Si catalyst that was formed from the substrate leads the growth of single-crystal Si nanowires with lengths of several micrometers and diameters ranging from 100 to 150 nm. A systematic investigation of the processing parameters revealed that the hydrogen flow rate is critical to the growth of the nanowires. At a high flow rate that exceeds 1000 sccm, the substrate is embrittled by H2, and liquid droplets, which lead the growth of nanowires by the vapor-liquid-solid mechanism, are formed on the substrate. Electrical transport measurements indicated that the nanowires grown with the multi-component catalyst have electrical properties comparable to those grown by a single-component Ti catalyst.

KW - Crystal growth

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KW - Semiconductors

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Self-catalytic growth of silicon nanowires on stainless steel

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

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