| Original language | English |
|---|---|
| Title of host publication | Silicon Heterostructure Handbook |
| Subtitle of host publication | Materials, Fabrication, Devices, Circuits and Applications of SiGe and Si Strained-Layer Epitaxy |
| Publisher | CRC Press |
| Pages | 4.12-539-4.12-552 |
| ISBN (Electronic) | 9781420026580 |
| ISBN (Print) | 9780849335594 |
| Publication status | Published - 2005 Jan 1 |
ASJC Scopus subject areas
- General Engineering
- General Environmental Science
- General Materials Science