Original language | English |
---|---|
Title of host publication | Silicon Heterostructure Handbook |
Subtitle of host publication | Materials, Fabrication, Devices, Circuits and Applications of SiGe and Si Strained-Layer Epitaxy |
Publisher | CRC Press |
Pages | 4.12-539-4.12-552 |
ISBN (Electronic) | 9781420026580 |
ISBN (Print) | 9780849335594 |
Publication status | Published - 2005 Jan 1 |
ASJC Scopus subject areas
- Engineering(all)
- Environmental Science(all)
- Materials Science(all)