SEM and Auger studies of a PLZT thin film

Kwangsoo No; Dae Sung Yoon; Jae Myung Kim

doi:10.1557/JMR.1993.0245

SEM and Auger studies of a PLZT thin film

Kwangsoo No, Dae Sung Yoon, Jae Myung Kim

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

The microstructure and the composition profile of lead lanthanum zirconate titanate thin film fabricated using the sol-gel method were analyzed using the scanning electron microscope and scanning Auger microscope. The PLZT thin film consists of micron-scale spheroidal perovskite grains and nano-scale pyrochlore grains. The perovskite grain has a higher lead and lower oxygen and zirconium contents than the pyrochlore grain. The Auger spectra of the two phases were similar except for energy shift and extra fine structure of oxygen peaks. The Auger depth profile and SEM observation of the cross-sectional fracture surface showed higher perovskite content near the interface between PLZT and ITO films than the surface of the PLZT film.

Original language	English
Pages (from-to)	245-248
Number of pages	4
Journal	Journal of Materials Research
Volume	8
Issue number	2
DOIs	https://doi.org/10.1557/JMR.1993.0245
Publication status	Published - 1993 Feb
Externally published	Yes

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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10.1557/JMR.1993.0245

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title = "SEM and Auger studies of a PLZT thin film",

abstract = "The microstructure and the composition profile of lead lanthanum zirconate titanate thin film fabricated using the sol-gel method were analyzed using the scanning electron microscope and scanning Auger microscope. The PLZT thin film consists of micron-scale spheroidal perovskite grains and nano-scale pyrochlore grains. The perovskite grain has a higher lead and lower oxygen and zirconium contents than the pyrochlore grain. The Auger spectra of the two phases were similar except for energy shift and extra fine structure of oxygen peaks. The Auger depth profile and SEM observation of the cross-sectional fracture surface showed higher perovskite content near the interface between PLZT and ITO films than the surface of the PLZT film.",

author = "Kwangsoo No and Yoon, {Dae Sung} and Kim, {Jae Myung}",

note = "Funding Information: This effort was supported Science and Technology.",

year = "1993",

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language = "English",

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T1 - SEM and Auger studies of a PLZT thin film

AU - No, Kwangsoo

AU - Yoon, Dae Sung

AU - Kim, Jae Myung

N1 - Funding Information: This effort was supported Science and Technology.

PY - 1993/2

Y1 - 1993/2

N2 - The microstructure and the composition profile of lead lanthanum zirconate titanate thin film fabricated using the sol-gel method were analyzed using the scanning electron microscope and scanning Auger microscope. The PLZT thin film consists of micron-scale spheroidal perovskite grains and nano-scale pyrochlore grains. The perovskite grain has a higher lead and lower oxygen and zirconium contents than the pyrochlore grain. The Auger spectra of the two phases were similar except for energy shift and extra fine structure of oxygen peaks. The Auger depth profile and SEM observation of the cross-sectional fracture surface showed higher perovskite content near the interface between PLZT and ITO films than the surface of the PLZT film.

AB - The microstructure and the composition profile of lead lanthanum zirconate titanate thin film fabricated using the sol-gel method were analyzed using the scanning electron microscope and scanning Auger microscope. The PLZT thin film consists of micron-scale spheroidal perovskite grains and nano-scale pyrochlore grains. The perovskite grain has a higher lead and lower oxygen and zirconium contents than the pyrochlore grain. The Auger spectra of the two phases were similar except for energy shift and extra fine structure of oxygen peaks. The Auger depth profile and SEM observation of the cross-sectional fracture surface showed higher perovskite content near the interface between PLZT and ITO films than the surface of the PLZT film.

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DO - 10.1557/JMR.1993.0245

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SP - 245

EP - 248

JO - Journal of Materials Research

JF - Journal of Materials Research

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SEM and Auger studies of a PLZT thin film

Abstract

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