Abstract
This work reports on SiGe HBTs with fT of 350 GHz. This is the highest reported fT for any Si-based transistor as well as any bipolar transistor. Associated fmax is 170 GHz, and BVCEO and BVCBO are measured to be 1.4 V and 5.0 V, respectively. Also achieved was the simultaneous optimization of fT and fmax, resulting in 270 GHz and 260 GHz, with BVCEO and BVCBO of 1.6 V and 5.5 V, respectively. The dependence of device performance on bias condition and device dimension has been investigated. Considerations regarding the extraction of such high fT and fmax values are also discussed.
Original language | English |
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Pages (from-to) | 771-774 |
Number of pages | 4 |
Journal | Technical Digest - International Electron Devices Meeting |
Publication status | Published - 2002 |
Externally published | Yes |
Event | 2002 IEEE International Devices Meeting (IEDM) - San Francisco, CA, United States Duration: 2002 Dec 8 → 2002 Dec 11 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry