@inproceedings{3602092fbbeb459d977d4e3871ae2130,
title = "Silicon based micro-scale metal grid for field emission device",
abstract = "For application to electron field emission devices, a metal grid based on a silicon frame is introduced. Silicon frame is used to improve the thermal resistivity and electrical stability by electron beam. Silicon based micro-scale metal grid fabricated using MEMS technology.",
keywords = "Field emission, MEMS, Metal grid",
author = "Jaehong Kim and Kim, {Jung Il} and Kim, {Geun Ju} and Duchang Heo and Jeon, {Seok Gy} and Shin, {Dong Hoon} and Yuning Sun and Lee, {Cheol Jin}",
year = "2012",
doi = "10.1109/IVNC.2012.6316932",
language = "English",
isbn = "9781467319812",
series = "Technical Digest - 25th International Vacuum Nanoelectronics Conference, IVNC 2012",
pages = "278--279",
booktitle = "Technical Digest - 25th International Vacuum Nanoelectronics Conference, IVNC 2012Om",
note = "25th International Vacuum Nanoelectronics Conference, IVNC 2012 ; Conference date: 09-07-2012 Through 13-07-2012",
}