Silicon nitride cantilever array integrated with silicon heaters and piezoelectric detectors for probe-based data storage

Hyo Jin Nam; Young Sik Kim; Caroline Sunyong Lee; Won Hyeog Jin; Seong Soo Jang; Il Joo Cho; Jong Uk Bu; Woo Beom Choi; Seung Woo Choi

doi:10.1016/j.sna.2006.05.030

Silicon nitride cantilever array integrated with silicon heaters and piezoelectric detectors for probe-based data storage

Hyo Jin Nam^*
, Young Sik Kim
, Caroline Sunyong Lee
, Won Hyeog Jin
, Seong Soo Jang
, Il Joo Cho
, Jong Uk Bu
, Woo Beom Choi
, Seung Woo Choi

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

21 Citations (Scopus)

Abstract

In this paper, new silicon nitride cantilevers integrated with silicon heaters and piezoelectric sensors have been developed to obtain an improved uniformity of the initial bending and the mechanical stability of the cantilever array for thermo-piezoelectric probe-based data storage. This nitride cantilever showed thickness uniformity less than 2%. Data bits of 40 nm in diameter were recorded on PMMA film. Sensitivity of the piezoelectric sensor was measured to be 0.615 fC/nm after poling, implying that indentations less than 20 nm in depth can be detected. Finally, 128 × 128 probe array was developed for high speed operation.

Original language	English
Pages (from-to)	329-333
Number of pages	5
Journal	Sensors and Actuators, A: Physical
Volume	134
Issue number	2
DOIs	https://doi.org/10.1016/j.sna.2006.05.030
Publication status	Published - 2007 Mar 15
Externally published	Yes

Keywords

Atomic force microscopy
Cantilever
Piezoelectric
Probe
Probe-based data storage
Tip

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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10.1016/j.sna.2006.05.030

Cite this

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title = "Silicon nitride cantilever array integrated with silicon heaters and piezoelectric detectors for probe-based data storage",

abstract = "In this paper, new silicon nitride cantilevers integrated with silicon heaters and piezoelectric sensors have been developed to obtain an improved uniformity of the initial bending and the mechanical stability of the cantilever array for thermo-piezoelectric probe-based data storage. This nitride cantilever showed thickness uniformity less than 2\%. Data bits of 40 nm in diameter were recorded on PMMA film. Sensitivity of the piezoelectric sensor was measured to be 0.615 fC/nm after poling, implying that indentations less than 20 nm in depth can be detected. Finally, 128 × 128 probe array was developed for high speed operation.",

keywords = "Atomic force microscopy, Cantilever, Piezoelectric, Probe, Probe-based data storage, Tip",

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year = "2007",

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day = "15",

doi = "10.1016/j.sna.2006.05.030",

language = "English",

volume = "134",

pages = "329--333",

journal = "Sensors and Actuators, A: Physical",

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TY - JOUR

T1 - Silicon nitride cantilever array integrated with silicon heaters and piezoelectric detectors for probe-based data storage

AU - Nam, Hyo Jin

AU - Kim, Young Sik

AU - Lee, Caroline Sunyong

AU - Jin, Won Hyeog

AU - Jang, Seong Soo

AU - Cho, Il Joo

AU - Bu, Jong Uk

AU - Choi, Woo Beom

AU - Choi, Seung Woo

PY - 2007/3/15

Y1 - 2007/3/15

N2 - In this paper, new silicon nitride cantilevers integrated with silicon heaters and piezoelectric sensors have been developed to obtain an improved uniformity of the initial bending and the mechanical stability of the cantilever array for thermo-piezoelectric probe-based data storage. This nitride cantilever showed thickness uniformity less than 2%. Data bits of 40 nm in diameter were recorded on PMMA film. Sensitivity of the piezoelectric sensor was measured to be 0.615 fC/nm after poling, implying that indentations less than 20 nm in depth can be detected. Finally, 128 × 128 probe array was developed for high speed operation.

AB - In this paper, new silicon nitride cantilevers integrated with silicon heaters and piezoelectric sensors have been developed to obtain an improved uniformity of the initial bending and the mechanical stability of the cantilever array for thermo-piezoelectric probe-based data storage. This nitride cantilever showed thickness uniformity less than 2%. Data bits of 40 nm in diameter were recorded on PMMA film. Sensitivity of the piezoelectric sensor was measured to be 0.615 fC/nm after poling, implying that indentations less than 20 nm in depth can be detected. Finally, 128 × 128 probe array was developed for high speed operation.

KW - Atomic force microscopy

KW - Cantilever

KW - Piezoelectric

KW - Probe

KW - Probe-based data storage

KW - Tip

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DO - 10.1016/j.sna.2006.05.030

M3 - Article

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SN - 0924-4247

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SP - 329

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JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

IS - 2

ER -

Silicon nitride cantilever array integrated with silicon heaters and piezoelectric detectors for probe-based data storage

Abstract

Keywords

ASJC Scopus subject areas

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