Simple patterning via adhesion between a buffered-oxide etchant-treated PDMS stamp and a SiO2 substrate

Yong Kwan Kim, Gyn Tae Kim, Jeong Sook Ha

    Research output: Contribution to journalArticlepeer-review

    24 Citations (Scopus)

    Abstract

    A very simple polydimethylsiloxane (PDMS) pattern-transfer method is devised, called buffered-oxide etchant (BOE) printing. The mechanism of pattern transfer is investigated, by considering the strong adhesion between the BOE-treated PDMS and the SiO2 substrate. PDMS patterns from a few micrometers to sub-micrometer size are transferred to the SiO2 substrate by just pressing a stamp that has been immersed in BOE solution for a few minutes. The patterned PDMS layers work as perfect physical and chemical passivation layers in the fabrication of metal electrodes and V 2O5 nanowire channels, respectively. Interestingly, a second stamping of the BOE-treated PDMS on the SiO2 substrate pre-patterned with metal as well as PDMS results in a selective transfer of the PDMS patterns only to the bare SiO2. In this way, the fabrication of a device structure consisting of two Au electrodes and V2O 5 nanowire network channels is possible; non-ohmic semiconducting I-V characteristics, which can be modeled by serially connected percolation, are observed.

    Original languageEnglish
    Pages (from-to)2125-2132
    Number of pages8
    JournalAdvanced Functional Materials
    Volume17
    Issue number13
    DOIs
    Publication statusPublished - 2007 Sept 3

    ASJC Scopus subject areas

    • General Chemistry
    • General Materials Science
    • Condensed Matter Physics

    Fingerprint

    Dive into the research topics of 'Simple patterning via adhesion between a buffered-oxide etchant-treated PDMS stamp and a SiO2 substrate'. Together they form a unique fingerprint.

    Cite this