TY - GEN
T1 - Simple selective electron beam patterning on a single nanowire
AU - Kim, Kanghyun
AU - Kang, Haeyong
AU - Huh, Jung Hwan
AU - Kim, Gyu Tae
N1 - Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.
PY - 2006
Y1 - 2006
N2 - Newly developed techniques of selective electron beam patterning on a single nanowire are introduced without using the coordinate markers on the substrate or with the help of the optical microscopes. Coordinate-less patterning by image processing under scanning electron microscope was efficient to define electrodes patterns on the 100 nm scale nanowires. And a method using an optical microscope image made it possible not only to create fine electrodes of 10 nm order of nanowires but to reduce the working times and enable the process easier. A proper selective patterning of the electrode on a selected individual nanowire will be quite helpful for the fundamental researches as the bottom-up approach on the different length scale of nanowires.
AB - Newly developed techniques of selective electron beam patterning on a single nanowire are introduced without using the coordinate markers on the substrate or with the help of the optical microscopes. Coordinate-less patterning by image processing under scanning electron microscope was efficient to define electrodes patterns on the 100 nm scale nanowires. And a method using an optical microscope image made it possible not only to create fine electrodes of 10 nm order of nanowires but to reduce the working times and enable the process easier. A proper selective patterning of the electrode on a selected individual nanowire will be quite helpful for the fundamental researches as the bottom-up approach on the different length scale of nanowires.
KW - Electron beam lithography
KW - Nanodevice
KW - Nanowire
UR - http://www.scopus.com/inward/record.url?scp=50249113985&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=50249113985&partnerID=8YFLogxK
U2 - 10.1109/NMDC.2006.4388790
DO - 10.1109/NMDC.2006.4388790
M3 - Conference contribution
AN - SCOPUS:50249113985
SN - 1424405408
SN - 9781424405404
T3 - 2006 IEEE Nanotechnology Materials and Devices Conference, NMDC
SP - 408
EP - 409
BT - 2006 IEEE Nanotechnology Materials and Devices Conference, NMDC
T2 - 2006 IEEE Nanotechnology Materials and Devices Conference, NMDC
Y2 - 22 October 2006 through 25 October 2006
ER -