Abstract
Silicon sensors with 3-D structures are expected to tolerate radiation levels higher than those of sensors based on normal planar technologies. We studied the performance of a single-sided 3-D silicon pixel-type sensor by using 3-D semiconductor simulation tools. We expect the 3-D silicon detector to have good charge collection efficiency and position resolution.
Original language | English |
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Pages (from-to) | 1101-1104 |
Number of pages | 4 |
Journal | Journal of the Korean Physical Society |
Volume | 58 |
Issue number | 5 |
DOIs | |
Publication status | Published - 2011 May 13 |
Keywords
- 3-D structures
- Silicon sensor
- Simulation
ASJC Scopus subject areas
- Physics and Astronomy(all)