Size control of crystalline germanium nanoparticles using inductively coupled nonthermal plasma

Kyoung Suk Oh; Ki Won Yang; Hong Tak Kim; Heon Lee; Jeong Chul Lee; Young Soo Sohn

doi:10.1166/jno.2013.1533

Size control of crystalline germanium nanoparticles using inductively coupled nonthermal plasma

Kyoung Suk Oh, Ki Won Yang, Hong Tak Kim, Heon Lee, Jeong Chul Lee, Young Soo Sohn

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

Inductively coupled nonthermal plasma has been utilized to synthesize size-tunable germanium nanoparticles (Ge NPs). Process pressure and radio-frequency (RF) power were modulated to investigate their effects on the size distribution of the synthesized Ge NPs. The size of the NPs was determined using transmission electron microscope (TEM) images. X-ray diffraction (XRD) analyses and Raman spectroscopy measurements were utilized to confirm the crystallinity of the synthesized Ge NPs. The consistency between the XRD analysis and the diffraction patterns from the TEM analysis indicated that the synthesized the Ge NPs were crystalline. Ge NPs with a mean diameter of less than 10 nm can be synthesized under proper experimental conditions.

Original language	English
Pages (from-to)	571-574
Number of pages	4
Journal	Journal of Nanoelectronics and Optoelectronics
Volume	8
Issue number	6
DOIs	https://doi.org/10.1166/jno.2013.1533
Publication status	Published - 2013 Dec

Keywords

Crystal
Germanium
Nanoparticle
Nonthermal Plasma

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1166/jno.2013.1533

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abstract = "Inductively coupled nonthermal plasma has been utilized to synthesize size-tunable germanium nanoparticles (Ge NPs). Process pressure and radio-frequency (RF) power were modulated to investigate their effects on the size distribution of the synthesized Ge NPs. The size of the NPs was determined using transmission electron microscope (TEM) images. X-ray diffraction (XRD) analyses and Raman spectroscopy measurements were utilized to confirm the crystallinity of the synthesized Ge NPs. The consistency between the XRD analysis and the diffraction patterns from the TEM analysis indicated that the synthesized the Ge NPs were crystalline. Ge NPs with a mean diameter of less than 10 nm can be synthesized under proper experimental conditions.",

keywords = "Crystal, Germanium, Nanoparticle, Nonthermal Plasma",

author = "Oh, {Kyoung Suk} and Yang, {Ki Won} and Kim, {Hong Tak} and Heon Lee and Lee, {Jeong Chul} and Sohn, {Young Soo}",

year = "2013",

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doi = "10.1166/jno.2013.1533",

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T1 - Size control of crystalline germanium nanoparticles using inductively coupled nonthermal plasma

AU - Oh, Kyoung Suk

AU - Yang, Ki Won

AU - Kim, Hong Tak

AU - Lee, Heon

AU - Lee, Jeong Chul

AU - Sohn, Young Soo

PY - 2013/12

Y1 - 2013/12

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AB - Inductively coupled nonthermal plasma has been utilized to synthesize size-tunable germanium nanoparticles (Ge NPs). Process pressure and radio-frequency (RF) power were modulated to investigate their effects on the size distribution of the synthesized Ge NPs. The size of the NPs was determined using transmission electron microscope (TEM) images. X-ray diffraction (XRD) analyses and Raman spectroscopy measurements were utilized to confirm the crystallinity of the synthesized Ge NPs. The consistency between the XRD analysis and the diffraction patterns from the TEM analysis indicated that the synthesized the Ge NPs were crystalline. Ge NPs with a mean diameter of less than 10 nm can be synthesized under proper experimental conditions.

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KW - Germanium

KW - Nanoparticle

KW - Nonthermal Plasma

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Size control of crystalline germanium nanoparticles using inductively coupled nonthermal plasma

Abstract

Keywords

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