Size-controllable quartz nanostructure for signal enhancement of DNA chip

Jung Suk Kim, Jae Bum Cho, Bo Gi Park, Wonbae Lee, Kyu Back Lee, Min Kyu Oh

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)


A mask-free, cost-effective dry-etching method for the fabrication of height- and spacing-controlled, pillar-like nanostructures was established in order to detect DNA molecules. The height and spacing of the quartz nanostructure were regulated by successive O2 and CF4 reactive ion etching times. The height and spacing of the nanostructures were tuned between 118 and 269nm and between 107 and 161nm, respectively. Probe DNA was immobilized on the structure and hybridized with fluorescently-labeled target DNA. Increases in the height and spacing of the nanopillar structure positively correlated with the fluorescence intensity of bound DNA. Usage of the nanostructure increased the DNA detection limit by up to 100-fold.

Original languageEnglish
Pages (from-to)2085-2089
Number of pages5
JournalBiosensors and Bioelectronics
Issue number5
Publication statusPublished - 2011 Jan 15


  • DNA chip
  • DNA sensor
  • Nanopillar
  • Nanostructured quartz

ASJC Scopus subject areas

  • Biotechnology
  • Biophysics
  • Biomedical Engineering
  • Electrochemistry


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