Size effect on tensile strength of surface-micromachined Al-3%Ti thin films

Jun Hyub Park; Man Sik Myung; Yun Jae Kim; Chang Seung Lee; Sung Hoon Choa; Woo Seong Che

doi:10.4028/0-87849-415-4.313

Size effect on tensile strength of surface-micromachined Al-3%Ti thin films

Jun Hyub Park, Man Sik Myung, Yun Jae Kim, Chang Seung Lee, Sung Hoon Choa, Woo Seong Che

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

A new tensile tester using an electromagnetic-force actuator (voice coil) was developed to measure the mechanical characteristics of surface-micromachined thin film materials. The tester has a load cell with maximum capacity of 0.5N and a non-contact position measuring system based on the principle of capacitance micrometry with 0.1 nm resolution for displacement measurement. The tester was applied for tensile testing of Al-3%Ti thin films with dimensions of 1000μm long, 50-480μm wide and 1.0 and 1.1 μm thick. The Al-3%Ti is commonly used in RF(radio frequency) microelectromechanical systems(MEMS) switch. The specimen with holes and bridges was designed for easy tensile test. The holes at center of grip end are able to make alignment and gripping easy. The bridges are to remove the side supports easily and extract specimen from wafer without sawing. It was found that the mean tensile strengths of Al-3%Ti are 140-380MPa, depending on the width of specimens and converging to a certain tensile strength as the width decreases.

Original language	English
Pages (from-to)	313-316
Number of pages	4
Journal	Key Engineering Materials
Volume	326-328 I
DOIs	https://doi.org/10.4028/0-87849-415-4.313
Publication status	Published - 2006

Keywords

Mechanical properties
RF MEMS Switch
Size effect
Tensile loading
Thin film

ASJC Scopus subject areas

General Materials Science
Mechanics of Materials
Mechanical Engineering

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10.4028/0-87849-415-4.313

Cite this

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title = "Size effect on tensile strength of surface-micromachined Al-3%Ti thin films",

abstract = "A new tensile tester using an electromagnetic-force actuator (voice coil) was developed to measure the mechanical characteristics of surface-micromachined thin film materials. The tester has a load cell with maximum capacity of 0.5N and a non-contact position measuring system based on the principle of capacitance micrometry with 0.1 nm resolution for displacement measurement. The tester was applied for tensile testing of Al-3%Ti thin films with dimensions of 1000μm long, 50-480μm wide and 1.0 and 1.1 μm thick. The Al-3%Ti is commonly used in RF(radio frequency) microelectromechanical systems(MEMS) switch. The specimen with holes and bridges was designed for easy tensile test. The holes at center of grip end are able to make alignment and gripping easy. The bridges are to remove the side supports easily and extract specimen from wafer without sawing. It was found that the mean tensile strengths of Al-3%Ti are 140-380MPa, depending on the width of specimens and converging to a certain tensile strength as the width decreases.",

keywords = "Mechanical properties, RF MEMS Switch, Size effect, Tensile loading, Thin film",

author = "Park, {Jun Hyub} and Myung, {Man Sik} and Kim, {Yun Jae} and Lee, {Chang Seung} and Choa, {Sung Hoon} and Che, {Woo Seong}",

year = "2006",

doi = "10.4028/0-87849-415-4.313",

language = "English",

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AU - Park, Jun Hyub

AU - Myung, Man Sik

AU - Kim, Yun Jae

AU - Lee, Chang Seung

AU - Choa, Sung Hoon

AU - Che, Woo Seong

PY - 2006

Y1 - 2006

N2 - A new tensile tester using an electromagnetic-force actuator (voice coil) was developed to measure the mechanical characteristics of surface-micromachined thin film materials. The tester has a load cell with maximum capacity of 0.5N and a non-contact position measuring system based on the principle of capacitance micrometry with 0.1 nm resolution for displacement measurement. The tester was applied for tensile testing of Al-3%Ti thin films with dimensions of 1000μm long, 50-480μm wide and 1.0 and 1.1 μm thick. The Al-3%Ti is commonly used in RF(radio frequency) microelectromechanical systems(MEMS) switch. The specimen with holes and bridges was designed for easy tensile test. The holes at center of grip end are able to make alignment and gripping easy. The bridges are to remove the side supports easily and extract specimen from wafer without sawing. It was found that the mean tensile strengths of Al-3%Ti are 140-380MPa, depending on the width of specimens and converging to a certain tensile strength as the width decreases.

AB - A new tensile tester using an electromagnetic-force actuator (voice coil) was developed to measure the mechanical characteristics of surface-micromachined thin film materials. The tester has a load cell with maximum capacity of 0.5N and a non-contact position measuring system based on the principle of capacitance micrometry with 0.1 nm resolution for displacement measurement. The tester was applied for tensile testing of Al-3%Ti thin films with dimensions of 1000μm long, 50-480μm wide and 1.0 and 1.1 μm thick. The Al-3%Ti is commonly used in RF(radio frequency) microelectromechanical systems(MEMS) switch. The specimen with holes and bridges was designed for easy tensile test. The holes at center of grip end are able to make alignment and gripping easy. The bridges are to remove the side supports easily and extract specimen from wafer without sawing. It was found that the mean tensile strengths of Al-3%Ti are 140-380MPa, depending on the width of specimens and converging to a certain tensile strength as the width decreases.

KW - Mechanical properties

KW - RF MEMS Switch

KW - Size effect

KW - Tensile loading

KW - Thin film

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Size effect on tensile strength of surface-micromachined Al-3%Ti thin films

Abstract

Keywords

ASJC Scopus subject areas

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