@inproceedings{2ac0b3b2dda2411ea8e9749169b87a4e,
title = "Smart chemical sensor application of ZnO nanowires grown on CMOS compatible SOI microheater platform",
abstract = "Smart chemical sensor based on CMOS(complementary metal-oxide- semiconductor) compatible SOI(silicon on insulator) microheater platform was realized by facilitating ZnO nanowires growth on the small membrane at the relatively low temperature. Our SOI microheater platform can be operated at the very low power consumption with novel metal oxide sensing materials, like ZnO or SnO2 nanostructured materials which demand relatively high sensing temperature. In addition, our sol-gel growth method of ZnO nanowires on the SOI membrane was found to be very effective compared with ink-jetting or CVD growth techniques. These combined techniques give us the possibility of smart chemical sensor technology easily merged into the conventional semiconductor IC application. The physical properties of ZnO nanowire network grown by the solution-based method and its chemical sensing property also were reported in this paper.",
keywords = "CMOS compatible SOI microheater, Smart chemical sensor and sol-gel growth, ZnO nanowire",
author = "Jonghyurk Park and Junghwan Huh and Ali, {S. Z.} and Florin Udrea and Gardner, {J. W.} and Kim, {G. T.} and Sunglyul Maeng and Milne, {W. I.}",
year = "2007",
language = "English",
isbn = "1420063421",
series = "2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings",
pages = "418--421",
booktitle = "2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings",
note = "2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007 ; Conference date: 20-05-2007 Through 24-05-2007",
}