Solving the Singularity Problem of Semiconductor Process Signal Using Improved Dynamic Time Warping

Jae Yeol Hong; Seung Hwan Park; Jun-Geol Baek

doi:10.1109/ICSC.2017.16

Solving the Singularity Problem of Semiconductor Process Signal Using Improved Dynamic Time Warping

Jae Yeol Hong, Seung Hwan Park, Jun-Geol Baek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Citations (Scopus)

Abstract

In the micro process such as semiconductor process, Variation of variables directly affects the quality of the end product. So, it is important to monitor and manage the fluctuations in the variable. At this time, the signal is generated. However, the signal has a moving average and non-uniform variance, and different lengths in specific portion. Also it has a different total length. Recently, the DTW(Dynamic Time Warping) is used to coordinate of signal. However, the mean and variance of the signal is not uniform, there arises a problem that the singularity occurs. Singularity means unintuitive alignments that single point in time series connects onto a portion of another time series. To solve the problem that the singularity occurs, in this paper, we propose to use MODWT (Maximal Overlap Discrete Wavelet Transform) as a feature of signal and then calculate the warping path using divided matrices. We solve the singularity problem when applying the DTW to process the signal. Also, by comparing the result of applying process signal to DTW and proposed method, the proposed method is confirmed to be better than DTW in process signal.

Original language	English
Title of host publication	Proceedings - IEEE 11th International Conference on Semantic Computing, ICSC 2017
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	266-267
Number of pages	2
ISBN (Electronic)	9781509048960
DOIs	https://doi.org/10.1109/ICSC.2017.16
Publication status	Published - 2017 Mar 29
Event	11th IEEE International Conference on Semantic Computing, ICSC 2017 - San Diego, United States Duration: 2017 Jan 30 → 2017 Feb 1

Other

Other	11th IEEE International Conference on Semantic Computing, ICSC 2017
Country/Territory	United States
City	San Diego
Period	17/1/30 → 17/2/1

Keywords

Dynamic time warping
Maximal overlap discrete wavelet transform
Semiconductor process signal
Singularity

ASJC Scopus subject areas

Computer Science Applications
Information Systems
Computer Networks and Communications

Access to Document

10.1109/ICSC.2017.16

Cite this

Solving the Singularity Problem of Semiconductor Process Signal Using Improved Dynamic Time Warping. / Hong, Jae Yeol; Park, Seung Hwan; Baek, Jun-Geol.
Proceedings - IEEE 11th International Conference on Semantic Computing, ICSC 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 266-267 7889540.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Hong, JY, Park, SH & Baek, J-G 2017, Solving the Singularity Problem of Semiconductor Process Signal Using Improved Dynamic Time Warping. in Proceedings - IEEE 11th International Conference on Semantic Computing, ICSC 2017., 7889540, Institute of Electrical and Electronics Engineers Inc., pp. 266-267, 11th IEEE International Conference on Semantic Computing, ICSC 2017, San Diego, United States, 17/1/30. https://doi.org/10.1109/ICSC.2017.16

@inproceedings{bdb961bb1aea4127b206c52c897c492a,

title = "Solving the Singularity Problem of Semiconductor Process Signal Using Improved Dynamic Time Warping",

abstract = "In the micro process such as semiconductor process, Variation of variables directly affects the quality of the end product. So, it is important to monitor and manage the fluctuations in the variable. At this time, the signal is generated. However, the signal has a moving average and non-uniform variance, and different lengths in specific portion. Also it has a different total length. Recently, the DTW(Dynamic Time Warping) is used to coordinate of signal. However, the mean and variance of the signal is not uniform, there arises a problem that the singularity occurs. Singularity means unintuitive alignments that single point in time series connects onto a portion of another time series. To solve the problem that the singularity occurs, in this paper, we propose to use MODWT (Maximal Overlap Discrete Wavelet Transform) as a feature of signal and then calculate the warping path using divided matrices. We solve the singularity problem when applying the DTW to process the signal. Also, by comparing the result of applying process signal to DTW and proposed method, the proposed method is confirmed to be better than DTW in process signal.",

keywords = "Dynamic time warping, Maximal overlap discrete wavelet transform, Semiconductor process signal, Singularity",

author = "Hong, {Jae Yeol} and Park, {Seung Hwan} and Jun-Geol Baek",

year = "2017",

month = mar,

day = "29",

doi = "10.1109/ICSC.2017.16",

language = "English",

pages = "266--267",

booktitle = "Proceedings - IEEE 11th International Conference on Semantic Computing, ICSC 2017",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "11th IEEE International Conference on Semantic Computing, ICSC 2017 ; Conference date: 30-01-2017 Through 01-02-2017",

}

TY - GEN

T1 - Solving the Singularity Problem of Semiconductor Process Signal Using Improved Dynamic Time Warping

AU - Hong, Jae Yeol

AU - Park, Seung Hwan

AU - Baek, Jun-Geol

PY - 2017/3/29

Y1 - 2017/3/29

N2 - In the micro process such as semiconductor process, Variation of variables directly affects the quality of the end product. So, it is important to monitor and manage the fluctuations in the variable. At this time, the signal is generated. However, the signal has a moving average and non-uniform variance, and different lengths in specific portion. Also it has a different total length. Recently, the DTW(Dynamic Time Warping) is used to coordinate of signal. However, the mean and variance of the signal is not uniform, there arises a problem that the singularity occurs. Singularity means unintuitive alignments that single point in time series connects onto a portion of another time series. To solve the problem that the singularity occurs, in this paper, we propose to use MODWT (Maximal Overlap Discrete Wavelet Transform) as a feature of signal and then calculate the warping path using divided matrices. We solve the singularity problem when applying the DTW to process the signal. Also, by comparing the result of applying process signal to DTW and proposed method, the proposed method is confirmed to be better than DTW in process signal.

AB - In the micro process such as semiconductor process, Variation of variables directly affects the quality of the end product. So, it is important to monitor and manage the fluctuations in the variable. At this time, the signal is generated. However, the signal has a moving average and non-uniform variance, and different lengths in specific portion. Also it has a different total length. Recently, the DTW(Dynamic Time Warping) is used to coordinate of signal. However, the mean and variance of the signal is not uniform, there arises a problem that the singularity occurs. Singularity means unintuitive alignments that single point in time series connects onto a portion of another time series. To solve the problem that the singularity occurs, in this paper, we propose to use MODWT (Maximal Overlap Discrete Wavelet Transform) as a feature of signal and then calculate the warping path using divided matrices. We solve the singularity problem when applying the DTW to process the signal. Also, by comparing the result of applying process signal to DTW and proposed method, the proposed method is confirmed to be better than DTW in process signal.

KW - Dynamic time warping

KW - Maximal overlap discrete wavelet transform

KW - Semiconductor process signal

KW - Singularity

UR - http://www.scopus.com/inward/record.url?scp=85018258179&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85018258179&partnerID=8YFLogxK

U2 - 10.1109/ICSC.2017.16

DO - 10.1109/ICSC.2017.16

M3 - Conference contribution

AN - SCOPUS:85018258179

SP - 266

EP - 267

BT - Proceedings - IEEE 11th International Conference on Semantic Computing, ICSC 2017

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 11th IEEE International Conference on Semantic Computing, ICSC 2017

Y2 - 30 January 2017 through 1 February 2017

ER -

Solving the Singularity Problem of Semiconductor Process Signal Using Improved Dynamic Time Warping

Abstract

Other

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this