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Spatial distribution of interface traps in sub-50-nm recess-channel-type DRAM cell transistors

  • Eun Ae Chung*
  • , Young Pil Kim
  • , Min Chul Park
  • , Kab Jin Nam
  • , Sung Sam Lee
  • , Ji Young Min
  • , Giyoung Yang
  • , Yu Gyun Shin
  • , Siyoung Choi
  • , Gyoyoung Jin
  • , Joo Tae Moon
  • , Sangsig Kim
  • *Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

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