Spectroscopic ellipsometry investigation on the excimer laser annealed indium thin oxide sol-gel films

Miru Noh; Ilwan Seo; Junghyun Park; J. S. Chung; Y. S. Lee; Hyuk Jin Kim; Young Jun Chang; J. H. Park; Min Gyu Kang; Chong Yun Kang

doi:10.1016/j.cap.2015.11.007

Spectroscopic ellipsometry investigation on the excimer laser annealed indium thin oxide sol-gel films

Miru Noh, Ilwan Seo, Junghyun Park, J. S. Chung, Y. S. Lee, Hyuk Jin Kim, Young Jun Chang, J. H. Park, Min Gyu Kang, Chong Yun Kang

Research output: Contribution to journal › Article › peer-review

22 Citations (Scopus)

Abstract

We report on the effect of the excimer laser annealing on the electronic properties of indium tin oxide (ITO) sol-gel films by using spectroscopic ellipsometric technique. We found that the excimer laser annealing effectively induces the crystallization as well as condensation of the sol-gel film. As the laser power increased, the carrier concentration and the relaxation time of photo-annealed films increased, with the bandgap shifting to higher energies. Simultaneously, the extinction coefficient values in the visible region were reduced significantly. We suggest that the excimer laser annealing should be a promising method for low temperature preparation of the ITO film on heat-sensitive substrates via the sol-gel process.

Original language	English
Pages (from-to)	145-149
Number of pages	5
Journal	Current Applied Physics
Volume	16
Issue number	2
DOIs	https://doi.org/10.1016/j.cap.2015.11.007
Publication status	Published - 2016 Feb 1

Bibliographical note

Funding Information:
This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korea government (MOE) ( NRF-2013R1A1A2012281 ) and ( MSIP ) ( NRF-2013R1A2A2A0106856 ). This work was supported by the 2014 Research Fund of the University of Seoul. A part of optical measurements were performed at Center for Correlated Electron Systems, IBS.

Publisher Copyright:
© 2015 Elsevier B.V. All rights reserved.

Keywords

Excimer laser annealing
Indium tin oxide
Sol-gel
Spectroscopic ellipsometry

ASJC Scopus subject areas

General Materials Science
General Physics and Astronomy

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title = "Spectroscopic ellipsometry investigation on the excimer laser annealed indium thin oxide sol-gel films",

abstract = "We report on the effect of the excimer laser annealing on the electronic properties of indium tin oxide (ITO) sol-gel films by using spectroscopic ellipsometric technique. We found that the excimer laser annealing effectively induces the crystallization as well as condensation of the sol-gel film. As the laser power increased, the carrier concentration and the relaxation time of photo-annealed films increased, with the bandgap shifting to higher energies. Simultaneously, the extinction coefficient values in the visible region were reduced significantly. We suggest that the excimer laser annealing should be a promising method for low temperature preparation of the ITO film on heat-sensitive substrates via the sol-gel process.",

keywords = "Excimer laser annealing, Indium tin oxide, Sol-gel, Spectroscopic ellipsometry",

author = "Miru Noh and Ilwan Seo and Junghyun Park and Chung, {J. S.} and Lee, {Y. S.} and Kim, {Hyuk Jin} and Chang, {Young Jun} and Park, {J. H.} and Kang, {Min Gyu} and Kang, {Chong Yun}",

note = "Funding Information: This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korea government (MOE) ( NRF-2013R1A1A2012281 ) and ( MSIP ) ( NRF-2013R1A2A2A0106856 ). This work was supported by the 2014 Research Fund of the University of Seoul. A part of optical measurements were performed at Center for Correlated Electron Systems, IBS. Publisher Copyright: {\textcopyright} 2015 Elsevier B.V. All rights reserved.",

year = "2016",

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doi = "10.1016/j.cap.2015.11.007",

language = "English",

volume = "16",

pages = "145--149",

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AU - Noh, Miru

AU - Seo, Ilwan

AU - Park, Junghyun

AU - Chung, J. S.

AU - Lee, Y. S.

AU - Kim, Hyuk Jin

AU - Chang, Young Jun

AU - Park, J. H.

AU - Kang, Min Gyu

AU - Kang, Chong Yun

N1 - Funding Information: This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korea government (MOE) ( NRF-2013R1A1A2012281 ) and ( MSIP ) ( NRF-2013R1A2A2A0106856 ). This work was supported by the 2014 Research Fund of the University of Seoul. A part of optical measurements were performed at Center for Correlated Electron Systems, IBS. Publisher Copyright: © 2015 Elsevier B.V. All rights reserved.

PY - 2016/2/1

Y1 - 2016/2/1

N2 - We report on the effect of the excimer laser annealing on the electronic properties of indium tin oxide (ITO) sol-gel films by using spectroscopic ellipsometric technique. We found that the excimer laser annealing effectively induces the crystallization as well as condensation of the sol-gel film. As the laser power increased, the carrier concentration and the relaxation time of photo-annealed films increased, with the bandgap shifting to higher energies. Simultaneously, the extinction coefficient values in the visible region were reduced significantly. We suggest that the excimer laser annealing should be a promising method for low temperature preparation of the ITO film on heat-sensitive substrates via the sol-gel process.

AB - We report on the effect of the excimer laser annealing on the electronic properties of indium tin oxide (ITO) sol-gel films by using spectroscopic ellipsometric technique. We found that the excimer laser annealing effectively induces the crystallization as well as condensation of the sol-gel film. As the laser power increased, the carrier concentration and the relaxation time of photo-annealed films increased, with the bandgap shifting to higher energies. Simultaneously, the extinction coefficient values in the visible region were reduced significantly. We suggest that the excimer laser annealing should be a promising method for low temperature preparation of the ITO film on heat-sensitive substrates via the sol-gel process.

KW - Excimer laser annealing

KW - Indium tin oxide

KW - Sol-gel

KW - Spectroscopic ellipsometry

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JF - Current Applied Physics

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Spectroscopic ellipsometry investigation on the excimer laser annealed indium thin oxide sol-gel films

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

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