SrTiO3 thin films deposited by CLCB in combination with sol-gel processing

Hochul Kang, Sungho Park, Kyekyoon Kim, Man Y. Sung, Hyungsoo Choi

    Research output: Contribution to journalArticlepeer-review

    5 Citations (Scopus)

    Abstract

    High-quality SrTiO3 thin films were deposited by charged liquid cluster beam (CLCB) method using a strontium carboxylate with a sol-gel processed Ti precursor at substrate temperatures of 400 and 500°C. The film deposited at 400°C was crystallized at 600-700°C to give a granular structure (film I) while the film deposited at 500°C (film II) gave a columnar structure of high crystallinity without postannealing. The grain growth and electric properties, such as dielectric constant, dissipation factor, leakage current density, and breakdown field, of films I and II were compared.

    Original languageEnglish
    Pages (from-to)F70-F72
    JournalElectrochemical and Solid-State Letters
    Volume7
    Issue number11
    DOIs
    Publication statusPublished - 2004

    ASJC Scopus subject areas

    • General Chemical Engineering
    • General Materials Science
    • Physical and Theoretical Chemistry
    • Electrochemistry
    • Electrical and Electronic Engineering

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