Stable deposition and patterning of metal layers on the PDMS substrate and characterization for the development of the flexible and implantable micro electrode

Ju Yeoul Baek, Gu Han Kwon, Jeong Yun Kim, Jin Ho Cho, Seung Ha Lee, Kyung Sun, Sang Hoon Lee

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    25 Citations (Scopus)

    Abstract

    PDMS(polydimethylsiloxane) is a flexible and biocompatible material and is widely used in bio- or medical-related fields. Recently, PDMS has been used as a substrate of implantable electrodes but has exhibited limits in stable metal layer deposition and patterning. In this paper, we have developed processes for both the stable metallization of PDMS surface and the selective patterning of conductive elements. The surface treatment via the oxygen plasma ions significantly affects the adhesion of metal layers to the PDMS surface, while the other factors exhibited no significant relations. On the basis of our procedure resulted in the effective production of the stable and fine (line width: 20 μm) electrode patterns on the PDMS substrate. Finally, we fabricated PDMS-based flexible and implantable micro electrode for the subretinal prosthesis.

    Original languageEnglish
    Title of host publicationAdvances in Nanomaterials and Processing - IUMRS - ICA - 2006 International Conference in Asia
    PublisherTrans Tech Publications Ltd
    Pages165-168
    Number of pages4
    EditionPART 1
    ISBN (Print)3908451310, 9783908451310
    DOIs
    Publication statusPublished - 2007
    EventIUMRS International Conference in Asia 2006, IUMRS-ICA 2006 - Jeju, Korea, Republic of
    Duration: 2006 Sept 102006 Sept 14

    Publication series

    NameSolid State Phenomena
    NumberPART 1
    Volume124-126
    ISSN (Print)1012-0394

    Other

    OtherIUMRS International Conference in Asia 2006, IUMRS-ICA 2006
    Country/TerritoryKorea, Republic of
    CityJeju
    Period06/9/1006/9/14

    Keywords

    • Deposition conditions
    • Metal layer deposition
    • PDMS
    • Subretinal prosthesis
    • Surface treatment

    ASJC Scopus subject areas

    • Atomic and Molecular Physics, and Optics
    • General Materials Science
    • Condensed Matter Physics

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