@inproceedings{cef0d743cd8a4cc8ad749cdd0bd07d51,
title = "Stable deposition and patterning of metal layers on the PDMS substrate and characterization for the development of the flexible and implantable micro electrode",
abstract = "PDMS(polydimethylsiloxane) is a flexible and biocompatible material and is widely used in bio- or medical-related fields. Recently, PDMS has been used as a substrate of implantable electrodes but has exhibited limits in stable metal layer deposition and patterning. In this paper, we have developed processes for both the stable metallization of PDMS surface and the selective patterning of conductive elements. The surface treatment via the oxygen plasma ions significantly affects the adhesion of metal layers to the PDMS surface, while the other factors exhibited no significant relations. On the basis of our procedure resulted in the effective production of the stable and fine (line width: 20 μm) electrode patterns on the PDMS substrate. Finally, we fabricated PDMS-based flexible and implantable micro electrode for the subretinal prosthesis.",
keywords = "Deposition conditions, Metal layer deposition, PDMS, Subretinal prosthesis, Surface treatment",
author = "Baek, {Ju Yeoul} and Kwon, {Gu Han} and Kim, {Jeong Yun} and Cho, {Jin Ho} and Lee, {Seung Ha} and Kyung Sun and Lee, {Sang Hoon}",
year = "2007",
doi = "10.4028/3-908451-31-0.165",
language = "English",
isbn = "3908451310",
series = "Solid State Phenomena",
publisher = "Trans Tech Publications Ltd",
number = "PART 1",
pages = "165--168",
booktitle = "Advances in Nanomaterials and Processing - IUMRS - ICA - 2006 International Conference in Asia",
edition = "PART 1",
note = "IUMRS International Conference in Asia 2006, IUMRS-ICA 2006 ; Conference date: 10-09-2006 Through 14-09-2006",
}