Static and dynamic analysis of a nanopositioning flexure-hinge stage with a flexible lever mechanism

Kyung S. Min, Woo C. Choi, Shin H. Song, Eun J. Hwang

    Research output: Contribution to journalArticlepeer-review

    27 Citations (Scopus)

    Abstract

    A displacement magnifying mechanism is usually employed in a nanopositioning stage to achieve large stage motion. A lever mechanism is the most widely used displacement magnifying mechanism. This study proposes a more reasonable model including flexible levers to estimate the stiffness and displacement of the stage. This paper describes an analytic lever model and its experimental verification. Analytic and experimental results were very similar. The model proposed in this study can well predict the stage motions.

    Original languageEnglish
    Pages (from-to)447-454
    Number of pages8
    JournalProceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture
    Volume219
    Issue number6
    DOIs
    Publication statusPublished - 2005 Jun

    Keywords

    • Dynamic analysis
    • Flexure
    • Flexure hinge
    • Lever mechanism
    • Stage
    • Static analysis

    ASJC Scopus subject areas

    • Mechanical Engineering
    • Industrial and Manufacturing Engineering

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