Static and dynamic analysis of a nanopositioning flexure-hinge stage with a flexible lever mechanism

Kyung S. Min; Woo C. Choi; Shin H. Song; Eun J. Hwang

doi:10.1243/095440505X32355

Static and dynamic analysis of a nanopositioning flexure-hinge stage with a flexible lever mechanism

Kyung S. Min, Woo C. Choi, Shin H. Song, Eun J. Hwang

School of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

26 Citations (Scopus)

Abstract

A displacement magnifying mechanism is usually employed in a nanopositioning stage to achieve large stage motion. A lever mechanism is the most widely used displacement magnifying mechanism. This study proposes a more reasonable model including flexible levers to estimate the stiffness and displacement of the stage. This paper describes an analytic lever model and its experimental verification. Analytic and experimental results were very similar. The model proposed in this study can well predict the stage motions.

Original language	English
Pages (from-to)	447-454
Number of pages	8
Journal	Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture
Volume	219
Issue number	6
DOIs	https://doi.org/10.1243/095440505X32355
Publication status	Published - 2005 Jun

Keywords

Dynamic analysis
Flexure
Flexure hinge
Lever mechanism
Stage
Static analysis

ASJC Scopus subject areas

Mechanical Engineering
Industrial and Manufacturing Engineering

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10.1243/095440505X32355

Cite this

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abstract = "A displacement magnifying mechanism is usually employed in a nanopositioning stage to achieve large stage motion. A lever mechanism is the most widely used displacement magnifying mechanism. This study proposes a more reasonable model including flexible levers to estimate the stiffness and displacement of the stage. This paper describes an analytic lever model and its experimental verification. Analytic and experimental results were very similar. The model proposed in this study can well predict the stage motions.",

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AU - Min, Kyung S.

AU - Choi, Woo C.

AU - Song, Shin H.

AU - Hwang, Eun J.

PY - 2005/6

Y1 - 2005/6

N2 - A displacement magnifying mechanism is usually employed in a nanopositioning stage to achieve large stage motion. A lever mechanism is the most widely used displacement magnifying mechanism. This study proposes a more reasonable model including flexible levers to estimate the stiffness and displacement of the stage. This paper describes an analytic lever model and its experimental verification. Analytic and experimental results were very similar. The model proposed in this study can well predict the stage motions.

AB - A displacement magnifying mechanism is usually employed in a nanopositioning stage to achieve large stage motion. A lever mechanism is the most widely used displacement magnifying mechanism. This study proposes a more reasonable model including flexible levers to estimate the stiffness and displacement of the stage. This paper describes an analytic lever model and its experimental verification. Analytic and experimental results were very similar. The model proposed in this study can well predict the stage motions.

KW - Dynamic analysis

KW - Flexure

KW - Flexure hinge

KW - Lever mechanism

KW - Stage

KW - Static analysis

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Static and dynamic analysis of a nanopositioning flexure-hinge stage with a flexible lever mechanism

Abstract

Keywords

ASJC Scopus subject areas

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