STM investigation of nano-structures fabricated on passivated Si surfaces

Jeong Sook Ha, Kang Ho Park, Kyoung Wan Park, Wan Soo Yun

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


We have successfully fabricated nano-structures on passivated Si surfaces and investigated those structures by using scanning tunneling microscope (STM) and atomic force microscope (AFM). Ag nano-dots were formed on Sb-passivated Si(100) surface via self-organization mechanism and the single-electron charging effect was observed by STM at room temperature. Thermal nitridation and subsequent oxygen-induced etching of Si surfaces resulted in the formation of silicon nano-dots using silicon nitride islands as masks. Au/Ti nano-wire was also fabricated via a selective ion etching of Au/Ti thin film using carbon nanotube (CNT) mask. These results suggest new fabrication method of nano-structures using surface chemical reactions without artificial lithography techniques.

Original languageEnglish
Pages (from-to)169-173
Number of pages5
JournalKorean Journal of Chemical Engineering
Issue number1
Publication statusPublished - 2003 Jan


  • Ag Nano dot
  • Atomic Force Microscope
  • Au Nano-wire
  • Carbon Nanotube
  • Nano-fabrication
  • Passivated Si Surfaces
  • Scanning Tunneling Microscope
  • Si Nano-dot

ASJC Scopus subject areas

  • Chemistry(all)
  • Chemical Engineering(all)


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