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Stress, Microstructure and Materials Reliability of Sputter-Deposited Fe-N Films
P. B. Narayan,
Y. K. Kim
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Contribution to journal
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Article
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peer-review
12
Citations (Scopus)
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Dive into the research topics of 'Stress, Microstructure and Materials Reliability of Sputter-Deposited Fe-N Films'. Together they form a unique fingerprint.
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Keyphrases
Microstructure
100%
Sputter-deposited
100%
Fe-N
100%
Materials Reliability
100%
Device Fabrication
25%
Heat Treatment
25%
As-deposited
25%
Humidity
25%
NiFe
25%
Low Reactivity
25%
High Reactivity
25%
Nitrogen Content
25%
N Content
25%
Compressive Stress
25%
Soft Magnetic Properties
25%
Atmospheric Pollutants
25%
Amorphous Microstructure
25%
Optimum N
25%
Material Science
Film
100%
Magnetic Property
33%
Heat Treatment
33%