Structural analysis on photocatalytic efficiency of TiO2 by chemical vapor deposition

Bumjoon Kim, Dongjin Byun, Joong Kee Lee, Dalkeun Park

Research output: Contribution to journalArticlepeer-review

31 Citations (Scopus)


Structural analysis of anatase TiO2 films on window glass by chemical vapor deposition (CVD) was performed. Relationships between preferred orientation and photocatalytic activity of polycrystalline TiO2 films were investigated. Photocatalytic activity was affected by crystalline orientation that depended on the deposition temperature. 〈112〉-oriented TiO2 films were obtained at 360°C, while 〈001〉-oriented films were obtained at other temperatures. Photocatalytic activity of the 〈112〉-oriented film was greater than that of the 〈001〉-oriented film. The film with 〈11〉2-preferred orientation exhibited a columnar structure resulting in a larger surface area for photocatalytic reaction than the films with 〈001〉-preferred orientation. Also, the film with 〈112〉-preferred orientation exhibited a facet consisting of s-faces {100} which showed the larger surface energy theoretically. It is clear that fabrication of the thin film TiO2 by CVD should be controlled to exhibit the 〈112〉-preferred orientation for the optimum photocatalytic efficiency.

Original languageEnglish
Pages (from-to)222-226
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Issue number1
Publication statusPublished - 2002


  • CVD
  • PBC
  • Photocatalytic
  • Preferred orientation
  • TiO

ASJC Scopus subject areas

  • General Engineering
  • General Physics and Astronomy


Dive into the research topics of 'Structural analysis on photocatalytic efficiency of TiO2 by chemical vapor deposition'. Together they form a unique fingerprint.

Cite this