Structural and electrochemical properties of LiNi0.7Co 0.15Mn0.15O2 thin film prepared by high frequency hybrid direct current and radio frequency magnetron sputtering

Youngmin Chung; Ho Young Park; Si Hyoung Oh; Dong Young Yoon; Sang Wan Jin; Dong Yoon Jang; Jang Myoun Ko; Won Il Cho; Seong Rae Lee

doi:10.1007/s10832-013-9845-5

Structural and electrochemical properties of LiNi_0.7Co _0.15Mn_0.15O₂ thin film prepared by high frequency hybrid direct current and radio frequency magnetron sputtering

Youngmin Chung, Ho Young Park, Si Hyoung Oh, Dong Young Yoon, Sang Wan Jin, Dong Yoon Jang, Jang Myoun Ko, Won Il Cho, Seong Rae Lee

Research output: Contribution to journal › Article › peer-review

12 Citations (Scopus)

Abstract

A LiNi_0.7Co_0.15Mn_0.15O₂ thin film cathode has been successfully prepared by hybrid direct current - radio frequency magnetron sputtering onto glass substrate from the LiNi _0.7Co_0.15Mn_0.15O₂ target and post-annealed by the rapid thermal annealing process. Its structure and morphology were characterized by X-ray diffraction, and scanning electron microscopy while its chemical compositions were confirmed with the inductively coupled plasma atomic absorption spectrophotometer, Raman spectroscopy, Auger electron spectroscopy, and glow discharge spectrometer. Its electrochemical properties were measured by galvanostatic charge - discharge test and cyclic voltammetry. First discharge capacity of 73 μAh cm^-2 μm ^-1 was obtained from a half cell with the LiNi_0.7Co _0.15Mn_0.15O₂ thin film cathode and lithium metal anode in the potential range of 4.3 ~ 2.5 V at 30 μA and its coulombic efficiency was more than 99 %.

Original language	English
Pages (from-to)	316-323
Number of pages	8
Journal	Journal of Electroceramics
Volume	31
Issue number	3-4
DOIs	https://doi.org/10.1007/s10832-013-9845-5
Publication status	Published - 2013 Dec

Bibliographical note

Funding Information:
Acknowledgments This work was supported and grant funded by GS Caltex Corporation and by the International collaboration research program supported by MKW (20118510010030) and by MKW (2011201010016C)

Keywords

Cathode
Glow discharge spectrometer
Hybrid direct current and radio frequency magnetron sputtering
LiNiCoMnO thin film
Thin film battery

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Ceramics and Composites
Condensed Matter Physics
Mechanics of Materials
Electrical and Electronic Engineering
Materials Chemistry

Access to Document

10.1007/s10832-013-9845-5

Cite this

Chung, Y., Park, H. Y., Oh, S. H., Yoon, D. Y., Jin, S. W., Jang, D. Y., Ko, J. M., Cho, W. I., & Lee, S. R. (2013). Structural and electrochemical properties of LiNi_0.7Co _0.15Mn_0.15O₂ thin film prepared by high frequency hybrid direct current and radio frequency magnetron sputtering. Journal of Electroceramics, 31(3-4), 316-323. https://doi.org/10.1007/s10832-013-9845-5

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title = "Structural and electrochemical properties of LiNi0.7Co 0.15Mn0.15O2 thin film prepared by high frequency hybrid direct current and radio frequency magnetron sputtering",

abstract = "A LiNi0.7Co0.15Mn0.15O2 thin film cathode has been successfully prepared by hybrid direct current - radio frequency magnetron sputtering onto glass substrate from the LiNi 0.7Co0.15Mn0.15O2 target and post-annealed by the rapid thermal annealing process. Its structure and morphology were characterized by X-ray diffraction, and scanning electron microscopy while its chemical compositions were confirmed with the inductively coupled plasma atomic absorption spectrophotometer, Raman spectroscopy, Auger electron spectroscopy, and glow discharge spectrometer. Its electrochemical properties were measured by galvanostatic charge - discharge test and cyclic voltammetry. First discharge capacity of 73 μAh cm-2 μm -1 was obtained from a half cell with the LiNi0.7Co 0.15Mn0.15O2 thin film cathode and lithium metal anode in the potential range of 4.3 ~ 2.5 V at 30 μA and its coulombic efficiency was more than 99 %.",

keywords = "Cathode, Glow discharge spectrometer, Hybrid direct current and radio frequency magnetron sputtering, LiNiCoMnO thin film, Thin film battery",

author = "Youngmin Chung and Park, {Ho Young} and Oh, {Si Hyoung} and Yoon, {Dong Young} and Jin, {Sang Wan} and Jang, {Dong Yoon} and Ko, {Jang Myoun} and Cho, {Won Il} and Lee, {Seong Rae}",

note = "Funding Information: Acknowledgments This work was supported and grant funded by GS Caltex Corporation and by the International collaboration research program supported by MKW (20118510010030) and by MKW (2011201010016C)",

year = "2013",

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doi = "10.1007/s10832-013-9845-5",

language = "English",

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AU - Chung, Youngmin

AU - Park, Ho Young

AU - Oh, Si Hyoung

AU - Yoon, Dong Young

AU - Jin, Sang Wan

AU - Jang, Dong Yoon

AU - Ko, Jang Myoun

AU - Cho, Won Il

AU - Lee, Seong Rae

N1 - Funding Information: Acknowledgments This work was supported and grant funded by GS Caltex Corporation and by the International collaboration research program supported by MKW (20118510010030) and by MKW (2011201010016C)

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Y1 - 2013/12

N2 - A LiNi0.7Co0.15Mn0.15O2 thin film cathode has been successfully prepared by hybrid direct current - radio frequency magnetron sputtering onto glass substrate from the LiNi 0.7Co0.15Mn0.15O2 target and post-annealed by the rapid thermal annealing process. Its structure and morphology were characterized by X-ray diffraction, and scanning electron microscopy while its chemical compositions were confirmed with the inductively coupled plasma atomic absorption spectrophotometer, Raman spectroscopy, Auger electron spectroscopy, and glow discharge spectrometer. Its electrochemical properties were measured by galvanostatic charge - discharge test and cyclic voltammetry. First discharge capacity of 73 μAh cm-2 μm -1 was obtained from a half cell with the LiNi0.7Co 0.15Mn0.15O2 thin film cathode and lithium metal anode in the potential range of 4.3 ~ 2.5 V at 30 μA and its coulombic efficiency was more than 99 %.

AB - A LiNi0.7Co0.15Mn0.15O2 thin film cathode has been successfully prepared by hybrid direct current - radio frequency magnetron sputtering onto glass substrate from the LiNi 0.7Co0.15Mn0.15O2 target and post-annealed by the rapid thermal annealing process. Its structure and morphology were characterized by X-ray diffraction, and scanning electron microscopy while its chemical compositions were confirmed with the inductively coupled plasma atomic absorption spectrophotometer, Raman spectroscopy, Auger electron spectroscopy, and glow discharge spectrometer. Its electrochemical properties were measured by galvanostatic charge - discharge test and cyclic voltammetry. First discharge capacity of 73 μAh cm-2 μm -1 was obtained from a half cell with the LiNi0.7Co 0.15Mn0.15O2 thin film cathode and lithium metal anode in the potential range of 4.3 ~ 2.5 V at 30 μA and its coulombic efficiency was more than 99 %.

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