Structural and piezoelectric properties of textured NLKNS-CZ thick films and their application in planar piezoactuator

0.97(Na_0.5-xLi_xK_0.5)(Nb_0.89Sb_0.11)O₃-0.03CaZrO₃ [(N_0.5-xL_xK)(NS)-CZ] piezoceramic (x = 0.325) has a pseudocubic-tetragonal-orthorhombic (PC-T-O) multi-structure. The PC structure formed in this piezoceramic was identified as the R3m rhombohedral structure. This piezoceramic showed the large piezoelectric charge constant (d₃₃) of 515 pC/N due to the PC-T-O multi-structure. The NaNbO₃ (NN) templates were used to texture the (N_0.5-xL_xK)(NS)-CZ thick films along the (001) direction, and the textured thick film (x = 0.0375) had a large Lotgering factor of 95.6%. The PC-T-O multi-structure was observed in this thick film (x = 0.0375), but the thick film (x = 0.0325) showed a PC-O structure owing to the diffusion of the NN templates into the thick film. The textured thick film (x = 0.0375) exhibited an increased d₃₃ of 625 pC/N because of the PC-T-O multi-structure and the lineup of grains along the [001] direction. A textured thick film (x = 0.0375) was used to fabricate a planar-type actuator to confirm its applicability to electrical devices. This actuator exhibits large acceleration (580.3 G) and displacement (150 μm) at a low electric field of 0.2 kV/mm with a short response time of 3.0 ms. Therefore, the (N_0.5-xL_xK)(NS)-CZ thick films are excellent lead-free piezoceramics.