Structural dependence of mechanical properties of Si incorporated diamond-like carbon films deposited by RF plasma-assisted chemical vapour deposition

Kwang Ryeol Lee, Myoung Geun Kim, Sung Jin Cho, Kwang Yong Eun, Tae Yeon Seong

Research output: Contribution to journalArticlepeer-review

73 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Structural dependence of mechanical properties of Si incorporated diamond-like carbon films deposited by RF plasma-assisted chemical vapour deposition'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds