Structural dependence of mechanical properties of Si incorporated diamond-like carbon films deposited by RF plasma-assisted chemical vapour deposition

Engineering & Materials Science

• Benzene 19%
• Chemical vapor deposition 74%
• Diamond like carbon films 100%
• Elastic constants 21%
• Gases 9%
• Hardness 12%
• Mechanical properties 41%
• Plasmas 58%
• Residual stresses 13%
• Silanes 40%

Physics & Astronomy

• benzene 12%
• carbon 42%
• diamonds 50%
• elastic properties 9%
• gases 6%
• hardness 10%
• mechanical properties 42%
• residual stress 11%
• silanes 27%
• vapor deposition 49%

Chemical Compounds

• Benzene 11%
• Carbon Atom 30%
• Chemical Vapour Deposition 57%
• Elasticity Constant 21%
• Gas 8%
• Liquid Film 30%
• Mixture 7%
• Residual Stress 21%
• Silane 30%