Structural features and microwave properties of Ba0.5Sr 0.5TiO3 films grown on sapphire substrates

Kwang Hwan Cho; Jong Yoon Ha; Chong Yun Kang; Ji Won Choi; Young Pak Lee; Seok Jin Yoon

doi:10.4028/3-908451-31-0.1829

Structural features and microwave properties of Ba_0.5Sr _0.5TiO₃ films grown on sapphire substrates

Kwang Hwan Cho, Jong Yoon Ha, Chong Yun Kang, Ji Won Choi, Young Pak Lee, Seok Jin Yoon

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The change in dielectric constant of ferroelectric materials as a function of electric field is the key to wide range of microwave application such as tunable filter, impedance matching network, and phase shifter, In this study, ferroelectric Ba_0.5Sr_0.5TiO₃ (BST) films were grown on r-cut sapphire and polycrystalline sapphire (poly-sapphire) substrates by RF sputtering. The results of comprehensive structural diagnostics of the films are correlated with the dielectric constant and dielectric loss of a co-planar BST varactor, measured at a frequency range of 1-3 GHz. Textured BST films approximately 500 nm thick, grown on r-cut sapphire substrates, are characterized by high dielectric constant ≥ 650. However, polycrystalline BST films, grown on poly-sapphire substrates, are less strained, having dielectric constant range of 430-640.

Original language	English
Title of host publication	Advances in Nanomaterials and Processing - IUMRS - ICA - 2006 International Conference in Asia
Publisher	Trans Tech Publications Ltd
Pages	1829-1832
Number of pages	4
Edition	PART 2
ISBN (Print)	3908451310, 9783908451310
DOIs	https://doi.org/10.4028/3-908451-31-0.1829
Publication status	Published - 2007
Event	IUMRS International Conference in Asia 2006, IUMRS-ICA 2006 - Jeju, Korea, Republic of Duration: 2006 Sept 10 → 2006 Sept 14

Publication series

Name	Solid State Phenomena
Number	PART 2
Volume	124-126
ISSN (Print)	1012-0394

Other

Other	IUMRS International Conference in Asia 2006, IUMRS-ICA 2006
Country/Territory	Korea, Republic of
City	Jeju
Period	06/9/10 → 06/9/14

Keywords

Ferroelectric thin film
Tunable microwave device

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
General Materials Science
Condensed Matter Physics

Access to Document

10.4028/3-908451-31-0.1829

Cite this

Cho, K. H., Ha, J. Y., Kang, C. Y., Choi, J. W., Lee, Y. P., & Yoon, S. J. (2007). Structural features and microwave properties of Ba_0.5Sr _0.5TiO₃ films grown on sapphire substrates. In Advances in Nanomaterials and Processing - IUMRS - ICA - 2006 International Conference in Asia (PART 2 ed., pp. 1829-1832). (Solid State Phenomena; Vol. 124-126, No. PART 2). Trans Tech Publications Ltd. https://doi.org/10.4028/3-908451-31-0.1829

Structural features and microwave properties of Ba_0.5Sr _0.5TiO₃ films grown on sapphire substrates. / Cho, Kwang Hwan; Ha, Jong Yoon; Kang, Chong Yun et al.
Advances in Nanomaterials and Processing - IUMRS - ICA - 2006 International Conference in Asia. PART 2. ed. Trans Tech Publications Ltd, 2007. p. 1829-1832 (Solid State Phenomena; Vol. 124-126, No. PART 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Cho, KH, Ha, JY, Kang, CY, Choi, JW, Lee, YP & Yoon, SJ 2007, Structural features and microwave properties of Ba_0.5Sr _0.5TiO₃ films grown on sapphire substrates. in Advances in Nanomaterials and Processing - IUMRS - ICA - 2006 International Conference in Asia. PART 2 edn, Solid State Phenomena, no. PART 2, vol. 124-126, Trans Tech Publications Ltd, pp. 1829-1832, IUMRS International Conference in Asia 2006, IUMRS-ICA 2006, Jeju, Korea, Republic of, 06/9/10. https://doi.org/10.4028/3-908451-31-0.1829

Cho KH, Ha JY, Kang CY, Choi JW, Lee YP, Yoon SJ. Structural features and microwave properties of Ba_0.5Sr _0.5TiO₃ films grown on sapphire substrates. In Advances in Nanomaterials and Processing - IUMRS - ICA - 2006 International Conference in Asia. PART 2 ed. Trans Tech Publications Ltd. 2007. p. 1829-1832. (Solid State Phenomena; PART 2). doi: 10.4028/3-908451-31-0.1829

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AB - The change in dielectric constant of ferroelectric materials as a function of electric field is the key to wide range of microwave application such as tunable filter, impedance matching network, and phase shifter, In this study, ferroelectric Ba0.5Sr0.5TiO3 (BST) films were grown on r-cut sapphire and polycrystalline sapphire (poly-sapphire) substrates by RF sputtering. The results of comprehensive structural diagnostics of the films are correlated with the dielectric constant and dielectric loss of a co-planar BST varactor, measured at a frequency range of 1-3 GHz. Textured BST films approximately 500 nm thick, grown on r-cut sapphire substrates, are characterized by high dielectric constant ≥ 650. However, polycrystalline BST films, grown on poly-sapphire substrates, are less strained, having dielectric constant range of 430-640.

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