Structural investigation of the bias-enhanced nucleation and growth of diamond films by microwave plasma chemical vapor deposition

Engineering & Materials Science

• Diamond films 100%
• Chemical vapor deposition 77%
• Nucleation 69%
• Crystallites 67%
• Plasmas 61%
• Microwaves 58%
• Diamonds 37%
• Transmission electron microscopy 29%
• Electron diffraction 25%
• Atomic force microscopy 24%
• Methane 8%
• Scanning electron microscopy 7%

Chemical Compounds

• Plasma Chemical Vapour Deposition 89%
• Diamond 62%
• Nucleation 54%
• Microwave 53%
• Crystallite 34%
• Liquid Film 32%
• Electron Diffraction 16%
• Transmission Electron Microscopy 16%
• Atomic Force Microscopy 13%
• Time 8%
• Methane 6%
• Scanning Electron Microscopy 4%

Physics & Astronomy

• diamond films 72%
• vapor deposition 50%
• nucleation 49%
• microwaves 44%
• crystallites 41%
• diamonds 30%
• transmission electron microscopy 18%
• electron diffraction 16%
• atomic force microscopy 14%
• methane 8%
• examination 7%
• scanning electron microscopy 6%