Structural, optical, and magnetic properties of Ag+, Mn+ and Ar+ ions implanted ZnO thin films: effect of implantation dose and stopping energy

Weon Cheol Lim, Jitendra Pal Singh, Jonghan Song, Tae Yeon Seong, Keun Hwa Chae

    Research output: Contribution to journalArticlepeer-review

    4 Citations (Scopus)

    Abstract

    Herein, we systematically studied the effect of various excitation processes on the structural, optical, and magnetic properties of ZnO films implanted with 80 keV Ar+, 110 keV Mn+, and 190 keV Ag+ ions. Four different doses of 1 × 1013, 1 × 1014, 1 × 1015, and 2 × 1016 ions per cm2 were used for implantation. It was observed that the structural, optical, and magnetic properties of the implanted samples were dominantly affected at the highest dose of 2 × 1016 ions per cm2. For lower doses, insignificant changes in these properties were observed. A comparison of various processes involved in the implantation process shows that both the electronic excitation and nuclear excitation processes are responsible for the changes in the structural, optical, and magnetic properties of the implanted ZnO films.

    Original languageEnglish
    Pages (from-to)29666-29676
    Number of pages11
    JournalRSC Advances
    Volume12
    Issue number46
    DOIs
    Publication statusPublished - 2022 Oct 18

    Bibliographical note

    Publisher Copyright:
    © 2022 The Royal Society of Chemistry.

    ASJC Scopus subject areas

    • General Chemistry
    • General Chemical Engineering

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