Structural study of amorphous vanadium oxide films for thin film microbattery

Han Ki Kim, Tae Yeon Seong, Young Soo Yoon

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	754-759
Number of pages	6
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	21
Issue number	2
DOIs	https://doi.org/10.1116/1.1547746
Publication status	Published - 2003
Externally published	Yes

ASJC Scopus subject areas

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AU - Seong, Tae Yeon

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