TY - JOUR
T1 - Structural variation of the BaTi4O9 thin films grown by RF magnetron sputtering
AU - Jang, Bo Yun
AU - Jeong, Young Hun
AU - Lee, Suk Jin
AU - Lee, Kyong Jae
AU - Nahm, Sahn
AU - Sun, Ho Jung
AU - Lee, Hwack Joo
N1 - Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.
PY - 2005/5
Y1 - 2005/5
N2 - BaTi4O9 thin films were grown on a Pt/Ti/SiO 2/Si substrate using rf magnetron sputtering and the structure of the thin films were then investigated. For the films grown at low temperature (≤350°C), an amorphous phase was formed during the deposition, which then changed to the BaTi5O11 phase when the annealing was conducted below 950°C. However, when the annealing temperature was higher than 950°C, a BaTi4O9 phase was formed. On the contrary, for the films grown at high temperature (>450°C), small BaTi4O9 grains were formed during the deposition, which grew during the annealing. The homogeneous BaTi4O9 thin films were successfully grown on Pt/Ti/SiO2/Si substrate when they were deposited at 550°C and subsequently rapid thermal annealed at 900°C for 3 min.
AB - BaTi4O9 thin films were grown on a Pt/Ti/SiO 2/Si substrate using rf magnetron sputtering and the structure of the thin films were then investigated. For the films grown at low temperature (≤350°C), an amorphous phase was formed during the deposition, which then changed to the BaTi5O11 phase when the annealing was conducted below 950°C. However, when the annealing temperature was higher than 950°C, a BaTi4O9 phase was formed. On the contrary, for the films grown at high temperature (>450°C), small BaTi4O9 grains were formed during the deposition, which grew during the annealing. The homogeneous BaTi4O9 thin films were successfully grown on Pt/Ti/SiO2/Si substrate when they were deposited at 550°C and subsequently rapid thermal annealed at 900°C for 3 min.
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U2 - 10.1111/j.1551-2916.2005.00311.x
DO - 10.1111/j.1551-2916.2005.00311.x
M3 - Article
AN - SCOPUS:27644468990
SN - 0002-7820
VL - 88
SP - 1209
EP - 1212
JO - Journal of the American Ceramic Society
JF - Journal of the American Ceramic Society
IS - 5
ER -