Abstract
The cluster beam deposition (CBD) method has been applied to fabricate and characterize pentacene-based thin film devices. Atomic force microscopy, scanning electron microscopy, and X-ray diffraction measurements demonstrate that the weakly bound and highly directional cluster beam is effective in producing a highly ordered structure close to a single crystal with a uniform flat film surface. The hole carrier mobility has been determined to be approximately 10-4 cm2/Vs as a lower bound from the J-V characteristics for the ITO/pentacene/Al devices. The Schottky barrier-type MOSFETs with a 10 μm long channel length have been produced and show a typical source-drain current modulation behavior with different gate voltage.
Original language | English |
---|---|
Pages (from-to) | 451-454 |
Number of pages | 4 |
Journal | Optical Materials |
Volume | 21 |
Issue number | 1-3 |
DOIs | |
Publication status | Published - 2003 Jan |
Keywords
- Cluster beam deposition
- Hole carrier mobility
- MOSFETs
- Pentacene
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Computer Science(all)
- Atomic and Molecular Physics, and Optics
- Spectroscopy
- Physical and Theoretical Chemistry
- Organic Chemistry
- Inorganic Chemistry
- Electrical and Electronic Engineering