Abstract
Recent work on field emitters has shown that a thin layer of porous silicon formed on the surface of pyramidal p-type silicon emitters can dramatically improve their emission characteristics, both in terms of the maximum emission current obtained and also the uniformity of emission between different pyramids [Wilshaw and Boswell, J. Vac. Sci. Technol. B 12, 662 (1994)]. A transmission electron microscope (TEM) study of the emitting surface of such pyramids is presented which shows that they are covered with a high density of surface asperities. TEM studies and electrical characterization are presented for two contrasting porous silicon morphologies.
| Original language | English |
|---|---|
| Pages (from-to) | 437-440 |
| Number of pages | 4 |
| Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Volume | 13 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 1995 Mar |
| Externally published | Yes |
| Event | Proceedings of the 7th International Vacuum Microelectronics Conference - Grenoble, Fr Duration: 1994 Jul 4 → 1994 Jul 7 |
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering