Study on hydrogen passivation behavior of SiNx film and its thermal annealing effect

Ji Yeon Hyun, Se Jin Park, Soohyun Bae, Hyunjung Park, Dongkyun Kang, Seung Hoon Lee, Hae Seok Lee, Yoonmook Kang, Donghwan Kim

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    1 Citation (Scopus)

    Abstract

    Al2 O3/SiNX passivation stacks have been widely adopted for high-efficiency silicon solar cells. We explored the effects of annealing step procedure and annealing temperature. It was shown that high iVoc were achieved when post annealing treatment performed than pre annealing. The reason for this result was analyzed by ATP images and SIMS profile.

    Original languageEnglish
    Title of host publication2018 IEEE 7th World Conference on Photovoltaic Energy Conversion, WCPEC 2018 - A Joint Conference of 45th IEEE PVSC, 28th PVSEC and 34th EU PVSEC
    PublisherInstitute of Electrical and Electronics Engineers Inc.
    Pages3102-3104
    Number of pages3
    ISBN (Electronic)9781538685297
    DOIs
    Publication statusPublished - 2018 Nov 26
    Event7th IEEE World Conference on Photovoltaic Energy Conversion, WCPEC 2018 - Waikoloa Village, United States
    Duration: 2018 Jun 102018 Jun 15

    Publication series

    Name2018 IEEE 7th World Conference on Photovoltaic Energy Conversion, WCPEC 2018 - A Joint Conference of 45th IEEE PVSC, 28th PVSEC and 34th EU PVSEC

    Other

    Other7th IEEE World Conference on Photovoltaic Energy Conversion, WCPEC 2018
    Country/TerritoryUnited States
    CityWaikoloa Village
    Period18/6/1018/6/15

    Bibliographical note

    Publisher Copyright:
    © 2018 IEEE.

    ASJC Scopus subject areas

    • Energy Engineering and Power Technology
    • Renewable Energy, Sustainability and the Environment
    • Electrical and Electronic Engineering
    • Electronic, Optical and Magnetic Materials

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