TY - GEN
T1 - Sub-100nm hybrid stamp fabrication by hot embossing
AU - Hong, Sung Hoon
AU - Yang, Kiyeon
AU - Lee, Heon
PY - 2006
Y1 - 2006
N2 - The fabrication of nano-structured materials using nanoimprint lithography has become more prevalent in recent years, due to its cost effectiveness and readiness. However, One of the biggest drawback of this technique is the fabrication of the imprinting stamp, which is expensive and difficult to fabricate. This paper describes a method of replication original Si or quartz made imprinting template into a polymer stamp which has many advantages, such as the simplicity and low cost of the fabrication process and the flexibility of the resulting stamp. Using the hot embossing method, PVC based imprint stamp with sub 100nm patterns can be fabricated. Due to its high UV transmittance, reasonable mechanical hardness and low surface energy, PVC based nanosized template can be used as a stamp for UV-NIL and sub lOOnm patterns were successfully transferred by the UV-NIL process with PVC based imprint stamp.
AB - The fabrication of nano-structured materials using nanoimprint lithography has become more prevalent in recent years, due to its cost effectiveness and readiness. However, One of the biggest drawback of this technique is the fabrication of the imprinting stamp, which is expensive and difficult to fabricate. This paper describes a method of replication original Si or quartz made imprinting template into a polymer stamp which has many advantages, such as the simplicity and low cost of the fabrication process and the flexibility of the resulting stamp. Using the hot embossing method, PVC based imprint stamp with sub 100nm patterns can be fabricated. Due to its high UV transmittance, reasonable mechanical hardness and low surface energy, PVC based nanosized template can be used as a stamp for UV-NIL and sub lOOnm patterns were successfully transferred by the UV-NIL process with PVC based imprint stamp.
KW - Flexible
KW - Hot embossing
KW - Nanoimprint lithography
KW - PVC
KW - Stamp
KW - UV-NIL
UR - http://www.scopus.com/inward/record.url?scp=34247555287&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=34247555287&partnerID=8YFLogxK
U2 - 10.4028/0-87849-995-4.462
DO - 10.4028/0-87849-995-4.462
M3 - Conference contribution
AN - SCOPUS:34247555287
SN - 0878499954
SN - 9780878499953
T3 - Materials Science Forum
SP - 462
EP - 465
BT - Eco-Materials Processing and Design VII - Proceedings of the Conference of the 7th International Symposium on Eco-Materials Processing and Design, ISEPD-7
PB - Trans Tech Publications Ltd
T2 - 7th International Symposium on Eco-Materials Processing and Design, ISEPD-7
Y2 - 8 January 2006 through 11 January 2006
ER -