Super-resolution optical measurement of nanoscale photoacid distribution in lithographic materials

Adam J. Berro, Andrew J. Berglund, Peter T. Carmichael, Jong Seung Kim, J. Alexander Liddle

    Research output: Contribution to journalArticlepeer-review

    20 Citations (Scopus)

    Abstract

    We demonstrate a method using photoactivation localization microscopy (PALM) in a soft-material system, with a rhodamine-lactam dye that is activated by both ultraviolet light and protonation, to reveal the nanoscale photoacid distribution in a model photoresist. Chemically amplified resists are the principal lithographic materials used in the semiconductor industry. The photoacid distribution generated upon exposure and its subsequent evolution during post-exposure bake is a major limiting factor in determining the resolution and lithographic quality of the final developed resist image. Our PALM data sets resolve the acid distribution in a latent image with subdiffraction limit accuracy. Our overall accuracy is currently limited by residual mechanical drift.

    Original languageEnglish
    Pages (from-to)9496-9502
    Number of pages7
    JournalACS nano
    Volume6
    Issue number11
    DOIs
    Publication statusPublished - 2012 Nov 27

    Keywords

    • chemically amplified resist
    • lithography
    • photoacid
    • single-molecule fluorescence
    • super-resolution microscopy

    ASJC Scopus subject areas

    • General Materials Science
    • General Engineering
    • General Physics and Astronomy

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