Abstract
We have developed superhydrophobic and superoleophobic surfaces based on ZnO nano-in-micro hierarchical structures on various large-area substrates. To fabricate the surfaces, ultraviolet nanoimprint lithography, a simple process enabling large-area patterning, was used in combination with hydrothermal synthesis. The wetting properties of the surfaces were analyzed by contact and sliding angle measurements with various solvents and by experiments determining self-cleaning properties. These analyses confirmed the superhydrophobicity and superoleophobicity of the fabricated surfaces.
Original language | English |
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Pages (from-to) | 51-57 |
Number of pages | 7 |
Journal | Microelectronic Engineering |
Volume | 116 |
DOIs | |
Publication status | Published - 2014 Mar 25 |
Keywords
- Nano imprint lithography
- Superhydrophobic
- Superoleophobic
- ZnO hierarchical structure
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering