Surface acoustic wave sensors to detect volatile gases by measuring output phase shift

Beom Keun Yoo; Yong Wook Park; Chong Yun Kang; Seok Jin Yoon; Jin Sang Kim

doi:10.1007/s10832-006-0470-4

Surface acoustic wave sensors to detect volatile gases by measuring output phase shift

Beom Keun Yoo, Yong Wook Park, Chong Yun Kang, Seok Jin Yoon, Jin Sang Kim

KU-KIST Graduate School of Converging Science and Technology

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

This paper presents properties of saw acoustic wave (SAW) gas sensors to detect volatile gases such as acetone, methanol, and ethanol by measuring phase shift. A dual-delay-line saw sensors with a center frequency of 100 MHz were fabricated on 128° Y-Z LiNbO₃ piezoelectric substrate. In order to improve sensitivity of SAW sensors, a thin titanium (Ti) film as mass sensitive layer was deposited using e-beam evaporation on the surface of the SAW sensors. In our investigation the response time and sensitivity of SAW sensors were measured. The response time and sensitivity of SAW sensor with thin Ti film were strongly improved because of changing electrical and mechanical properties in the mass sensitive layer. As a result, high sensitivity and fast response time could be achieved by deposition of thin Ti film as mass sensitive layer on the surface of SAW sensor. It can be applied for high performance electronic nose system by assembling an array of different sensors.

Original language	English
Pages (from-to)	1013-1017
Number of pages	5
Journal	Journal of Electroceramics
Volume	17
Issue number	2-4
DOIs	https://doi.org/10.1007/s10832-006-0470-4
Publication status	Published - 2006 Dec

Bibliographical note

Funding Information:
Acknowledgments The authors gratefully acknowledge the support of this work by a grant (code #: 2004-00793) from the Ministry of Commerce, Industry and Energy, Korea.

Keywords

Gas sensor
Phase shift
SAW
Sensitive layer

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Ceramics and Composites
Condensed Matter Physics
Mechanics of Materials
Materials Chemistry
Electrical and Electronic Engineering

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10.1007/s10832-006-0470-4

Cite this

@article{b46873832c434414b5ac2b0a68521d89,

title = "Surface acoustic wave sensors to detect volatile gases by measuring output phase shift",

abstract = "This paper presents properties of saw acoustic wave (SAW) gas sensors to detect volatile gases such as acetone, methanol, and ethanol by measuring phase shift. A dual-delay-line saw sensors with a center frequency of 100 MHz were fabricated on 128° Y-Z LiNbO3 piezoelectric substrate. In order to improve sensitivity of SAW sensors, a thin titanium (Ti) film as mass sensitive layer was deposited using e-beam evaporation on the surface of the SAW sensors. In our investigation the response time and sensitivity of SAW sensors were measured. The response time and sensitivity of SAW sensor with thin Ti film were strongly improved because of changing electrical and mechanical properties in the mass sensitive layer. As a result, high sensitivity and fast response time could be achieved by deposition of thin Ti film as mass sensitive layer on the surface of SAW sensor. It can be applied for high performance electronic nose system by assembling an array of different sensors.",

keywords = "Gas sensor, Phase shift, SAW, Sensitive layer",

author = "Yoo, {Beom Keun} and Park, {Yong Wook} and Kang, {Chong Yun} and Yoon, {Seok Jin} and Kim, {Jin Sang}",

note = "Funding Information: Acknowledgments The authors gratefully acknowledge the support of this work by a grant (code #: 2004-00793) from the Ministry of Commerce, Industry and Energy, Korea.",

year = "2006",

month = dec,

doi = "10.1007/s10832-006-0470-4",

language = "English",

volume = "17",

pages = "1013--1017",

journal = "Journal of Electroceramics",

issn = "1385-3449",

publisher = "Springer Netherlands",

number = "2-4",

}

TY - JOUR

T1 - Surface acoustic wave sensors to detect volatile gases by measuring output phase shift

AU - Yoo, Beom Keun

AU - Park, Yong Wook

AU - Kang, Chong Yun

AU - Yoon, Seok Jin

AU - Kim, Jin Sang

N1 - Funding Information: Acknowledgments The authors gratefully acknowledge the support of this work by a grant (code #: 2004-00793) from the Ministry of Commerce, Industry and Energy, Korea.

PY - 2006/12

Y1 - 2006/12

N2 - This paper presents properties of saw acoustic wave (SAW) gas sensors to detect volatile gases such as acetone, methanol, and ethanol by measuring phase shift. A dual-delay-line saw sensors with a center frequency of 100 MHz were fabricated on 128° Y-Z LiNbO3 piezoelectric substrate. In order to improve sensitivity of SAW sensors, a thin titanium (Ti) film as mass sensitive layer was deposited using e-beam evaporation on the surface of the SAW sensors. In our investigation the response time and sensitivity of SAW sensors were measured. The response time and sensitivity of SAW sensor with thin Ti film were strongly improved because of changing electrical and mechanical properties in the mass sensitive layer. As a result, high sensitivity and fast response time could be achieved by deposition of thin Ti film as mass sensitive layer on the surface of SAW sensor. It can be applied for high performance electronic nose system by assembling an array of different sensors.

AB - This paper presents properties of saw acoustic wave (SAW) gas sensors to detect volatile gases such as acetone, methanol, and ethanol by measuring phase shift. A dual-delay-line saw sensors with a center frequency of 100 MHz were fabricated on 128° Y-Z LiNbO3 piezoelectric substrate. In order to improve sensitivity of SAW sensors, a thin titanium (Ti) film as mass sensitive layer was deposited using e-beam evaporation on the surface of the SAW sensors. In our investigation the response time and sensitivity of SAW sensors were measured. The response time and sensitivity of SAW sensor with thin Ti film were strongly improved because of changing electrical and mechanical properties in the mass sensitive layer. As a result, high sensitivity and fast response time could be achieved by deposition of thin Ti film as mass sensitive layer on the surface of SAW sensor. It can be applied for high performance electronic nose system by assembling an array of different sensors.

KW - Gas sensor

KW - Phase shift

KW - SAW

KW - Sensitive layer

UR - http://www.scopus.com/inward/record.url?scp=33847306015&partnerID=8YFLogxK

U2 - 10.1007/s10832-006-0470-4

DO - 10.1007/s10832-006-0470-4

M3 - Article

AN - SCOPUS:33847306015

SN - 1385-3449

VL - 17

SP - 1013

EP - 1017

JO - Journal of Electroceramics

JF - Journal of Electroceramics

IS - 2-4

ER -

Surface acoustic wave sensors to detect volatile gases by measuring output phase shift

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

Access to Document

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