Surface Assembly Strategy for the Fabrication of MoS2 Thin-Film Patterns

Gyuyeol Park; Hyun Soo Kim; Byung Yang Lee

doi:10.1007/s12541-019-00207-9

Surface Assembly Strategy for the Fabrication of MoS₂ Thin-Film Patterns

Gyuyeol Park, Hyun Soo Kim, Byung Yang Lee

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

Molybdenum disulfide (MoS₂) is a novel material with remarkable properties that is widely investigated for future applications in electronics, sensors, and smart materials. In this respect, a low cost, easy process, large-area mass production process is needed to obtain diverse structures and surface patterns of MoS₂. Here, we demonstrate an effective MoS₂ patterning process using substrate surface modification that can solve the difficulties encountered in previous studies. This technique utilizes the sulfur vacancies introduced during chemical exfoliation of MoS₂ flakes. The MoS₂ patterning is performed via surface modification with thiol molecules on the substrate in pre-designed shapes. The thiol (–SH) group required to bond MoS₂ to the surface-modified substrate using (3-mercaptopropyl)trimethoxysilane was confirmed by FT-IR and the patterned MoS₂ was confirmed by Raman shift. Through this process, a gas sensor was fabricated and its feasibility was confirmed to show its applicability to various applications MoS₂.

Original language	English
Pages (from-to)	2215-2220
Number of pages	6
Journal	International Journal of Precision Engineering and Manufacturing
Volume	20
Issue number	12
DOIs	https://doi.org/10.1007/s12541-019-00207-9
Publication status	Published - 2019 Dec 1

Bibliographical note

Funding Information:
This project was supported by the National Research Foundation (NRF) (2016M3A7B4909581, 2018R1A2B2006640) and the Global Frontier Project from the Center for Intergrated Smart Sensors(CISS-2011-0031866), funded by the Ministry of Science and ICT.

Funding Information:
This project was supported by the National Research Foundation (NRF) (2016M3A7B4909581, 2018R1A2B2006640) and the Global Frontier Project from the Center for Intergrated Smart Sensors(CISS-2011-0031866), funded by the Ministry of Science and ICT.

Publisher Copyright:
© 2019, Korean Society for Precision Engineering.

Keywords

Molybdenum disulfide
Sulfur defect
Surface modification
Thin-film patterning

ASJC Scopus subject areas

Mechanical Engineering
Industrial and Manufacturing Engineering
Electrical and Electronic Engineering

Access to Document

10.1007/s12541-019-00207-9

Cite this

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title = "Surface Assembly Strategy for the Fabrication of MoS2 Thin-Film Patterns",

abstract = "Molybdenum disulfide (MoS2) is a novel material with remarkable properties that is widely investigated for future applications in electronics, sensors, and smart materials. In this respect, a low cost, easy process, large-area mass production process is needed to obtain diverse structures and surface patterns of MoS2. Here, we demonstrate an effective MoS2 patterning process using substrate surface modification that can solve the difficulties encountered in previous studies. This technique utilizes the sulfur vacancies introduced during chemical exfoliation of MoS2 flakes. The MoS2 patterning is performed via surface modification with thiol molecules on the substrate in pre-designed shapes. The thiol (–SH) group required to bond MoS2 to the surface-modified substrate using (3-mercaptopropyl)trimethoxysilane was confirmed by FT-IR and the patterned MoS2 was confirmed by Raman shift. Through this process, a gas sensor was fabricated and its feasibility was confirmed to show its applicability to various applications MoS2.",

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note = "Funding Information: This project was supported by the National Research Foundation (NRF) (2016M3A7B4909581, 2018R1A2B2006640) and the Global Frontier Project from the Center for Intergrated Smart Sensors(CISS-2011-0031866), funded by the Ministry of Science and ICT. Funding Information: This project was supported by the National Research Foundation (NRF) (2016M3A7B4909581, 2018R1A2B2006640) and the Global Frontier Project from the Center for Intergrated Smart Sensors(CISS-2011-0031866), funded by the Ministry of Science and ICT. Publisher Copyright: {\textcopyright} 2019, Korean Society for Precision Engineering.",

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