Surface-micromachined flexible polysilicon sensor array

Keyphrases

• Sensor Array 100%
• Surface Micromachining 100%
• Polysilicon 100%
• Silica 33%
• Strain Gauge 33%
• Multicrystalline Silicon 33%
• Oxide-based 33%
• Mechanical Flexibility 33%
• Sacrificial Layer 33%
• Gauge Factor 33%
• Single Process 33%
• Strain Sensor 33%
• Circuit Board 33%
• Non-planar Surface 33%
• Alignment Problem 33%
• Assembly Problem 33%
• Silicon Strain Gauge 33%
• Polysilicon Strain Gauge 33%
• Flexible Strain Gauge 33%

Engineering

• Sensor Array 100%
• Polysilicon 100%
• Strain Gage 75%
• Surface Micro-Machining 50%
• Limitations 25%
• Gauge Factor 25%
• Metal Strain Gauge 25%
• Silicon Single Crystal 25%
• Silicon Dioxide 25%