Synthesis and characterization of titania films on Mo(1 1 0)

X. Lai, Q. Guo, B. K. Min, D. W. Goodman

Research output: Contribution to journalArticlepeer-review

45 Citations (Scopus)


Ultra-thin titania films were grown on a Mo(1 1 0) substrate by vapor depositing Ti in an O2 ambient (5 × 10-7 Torr) at 600 K, followed by annealing to 900-1200 K. X-ray photoelectron spectroscopy showed that titanium oxide films annealed to 900 K were partially reduced, exhibiting Ti4+, Ti3+ and Ti2+ species, whereas films annealed to 1200 K were fully oxidized and exhibited only Ti4+. Corresponding scanning tunneling microscopy measurements revealed layer-by-layer growth of titania films on Mo(1 1 0) at 900 K. Flat terraces with three different orientations were observed. The line spacings between the neighboring atomic rows for all terraces were ∼6.5 Å, suggesting epitaxial growth of TiO2(1 1 0)-(1 × 1). A further anneal of the films to 1200 K led to three-dimensional, rough surfaces for the fully oxidized films, indicating the formation of stable crystallites at high temperature.

Original languageEnglish
Pages (from-to)1-8
Number of pages8
JournalSurface Science
Issue number1-3
Publication statusPublished - 2001 Jul 20
Externally publishedYes


  • Growth
  • Molybdenum
  • Scanning tunneling microscopy
  • Titanium oxide
  • X-ray photoelectron spectroscopy

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry


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