Abstract
2D materials, such as graphene, exhibit great potential as functional materials for numerous novel applications due to their excellent properties. The grafting of conventional micropatterning techniques on new types of electronic devices is required to fully utilize the unique nature of graphene. However, the conventional lithography and polymer-supported transfer methods often induce the contamination and damage of the graphene surface due to polymer residues and harsh wet-transfer conditions. Herein, a novel strategy to obtain micropatterned graphene on polymer substrates using a direct curing process is demonstrated. Employing this method, entirely flexible, transparent, well-defined self-activated graphene sensor arrays, capable of gas discrimination without external heating, are fabricated on 4 in. wafer-scale substrates. Finite element method simulations show the potential of this patterning technique to maximize the performance of the sensor devices when the active channels of the 2D material are suspended and nanoscaled. This study contributes considerably to the development of flexible functional electronic devices based on 2D materials.
Original language | English |
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Article number | 2004827 |
Journal | Advanced Materials |
Volume | 33 |
Issue number | 2 |
DOIs | |
Publication status | Published - 2021 Jan 14 |
Bibliographical note
Funding Information:Y.K. and T.K. contributed equally to this work. This work was financially supported by the Ministry of Science and ICT (2020M2D8A206983011), the Basic Science Research Program (2017R1A2B3009135), and the Nano Material Technology Development Program (2016M3A7B4910) through the National Research Foundation of Korea (NRF). This work was also partly supported by the Technology development Program (S2939998) of the Ministry of SMEs and Startups (MSS, Korea) and performed, in part, at the Center for Integrated Nanotechnologies, an Office of Science User Facility operated for the U.S. Department of Energy (DOE) Office of Science. Los Alamos National Laboratory, an affirmative action equal opportunity employer, is managed by Triad National Security, LLC for the U.S. Department of Energy's NNSA, under contract 9233218CNA000001.
Publisher Copyright:
© 2020 Wiley-VCH GmbH
Keywords
- 2D materials
- chemical sensor arrays
- finite element simulations
- graphene
- microscale patterning
ASJC Scopus subject areas
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering