Tailored Graphene Micropatterns by Wafer-Scale Direct Transfer for Flexible Chemical Sensor Platform

Yeonhoo Kim; Taehoon Kim; Jinwoo Lee; Yong Seok Choi; Joonhee Moon; Seo Yun Park; Tae Hyung Lee; Hoon Kee Park; Sol A. Lee; Min Sang Kwon; Hyung Gi Byun; Jong Heun Lee; Myoung Gyu Lee; Byung Hee Hong; Ho Won Jang

doi:10.1002/adma.202004827

Tailored Graphene Micropatterns by Wafer-Scale Direct Transfer for Flexible Chemical Sensor Platform

Yeonhoo Kim, Taehoon Kim, Jinwoo Lee, Yong Seok Choi, Joonhee Moon, Seo Yun Park, Tae Hyung Lee, Hoon Kee Park, Sol A. Lee, Min Sang Kwon, Hyung Gi Byun, Jong Heun Lee, Myoung Gyu Lee, Byung Hee Hong, Ho Won Jang

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

43 Citations (Scopus)

Abstract

2D materials, such as graphene, exhibit great potential as functional materials for numerous novel applications due to their excellent properties. The grafting of conventional micropatterning techniques on new types of electronic devices is required to fully utilize the unique nature of graphene. However, the conventional lithography and polymer-supported transfer methods often induce the contamination and damage of the graphene surface due to polymer residues and harsh wet-transfer conditions. Herein, a novel strategy to obtain micropatterned graphene on polymer substrates using a direct curing process is demonstrated. Employing this method, entirely flexible, transparent, well-defined self-activated graphene sensor arrays, capable of gas discrimination without external heating, are fabricated on 4 in. wafer-scale substrates. Finite element method simulations show the potential of this patterning technique to maximize the performance of the sensor devices when the active channels of the 2D material are suspended and nanoscaled. This study contributes considerably to the development of flexible functional electronic devices based on 2D materials.

Original language	English
Article number	2004827
Journal	Advanced Materials
Volume	33
Issue number	2
DOIs	https://doi.org/10.1002/adma.202004827
Publication status	Published - 2021 Jan 14

Bibliographical note

Funding Information:
Y.K. and T.K. contributed equally to this work. This work was financially supported by the Ministry of Science and ICT (2020M2D8A206983011), the Basic Science Research Program (2017R1A2B3009135), and the Nano Material Technology Development Program (2016M3A7B4910) through the National Research Foundation of Korea (NRF). This work was also partly supported by the Technology development Program (S2939998) of the Ministry of SMEs and Startups (MSS, Korea) and performed, in part, at the Center for Integrated Nanotechnologies, an Office of Science User Facility operated for the U.S. Department of Energy (DOE) Office of Science. Los Alamos National Laboratory, an affirmative action equal opportunity employer, is managed by Triad National Security, LLC for the U.S. Department of Energy's NNSA, under contract 9233218CNA000001.

Publisher Copyright:
© 2020 Wiley-VCH GmbH

Keywords

2D materials
chemical sensor arrays
finite element simulations
graphene
microscale patterning

ASJC Scopus subject areas

Materials Science(all)
Mechanics of Materials
Mechanical Engineering

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10.1002/adma.202004827

Cite this

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title = "Tailored Graphene Micropatterns by Wafer-Scale Direct Transfer for Flexible Chemical Sensor Platform",

abstract = "2D materials, such as graphene, exhibit great potential as functional materials for numerous novel applications due to their excellent properties. The grafting of conventional micropatterning techniques on new types of electronic devices is required to fully utilize the unique nature of graphene. However, the conventional lithography and polymer-supported transfer methods often induce the contamination and damage of the graphene surface due to polymer residues and harsh wet-transfer conditions. Herein, a novel strategy to obtain micropatterned graphene on polymer substrates using a direct curing process is demonstrated. Employing this method, entirely flexible, transparent, well-defined self-activated graphene sensor arrays, capable of gas discrimination without external heating, are fabricated on 4 in. wafer-scale substrates. Finite element method simulations show the potential of this patterning technique to maximize the performance of the sensor devices when the active channels of the 2D material are suspended and nanoscaled. This study contributes considerably to the development of flexible functional electronic devices based on 2D materials.",

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author = "Yeonhoo Kim and Taehoon Kim and Jinwoo Lee and Choi, {Yong Seok} and Joonhee Moon and Park, {Seo Yun} and Lee, {Tae Hyung} and Park, {Hoon Kee} and Lee, {Sol A.} and Kwon, {Min Sang} and Byun, {Hyung Gi} and Lee, {Jong Heun} and Lee, {Myoung Gyu} and Hong, {Byung Hee} and Jang, {Ho Won}",

note = "Funding Information: Y.K. and T.K. contributed equally to this work. This work was financially supported by the Ministry of Science and ICT (2020M2D8A206983011), the Basic Science Research Program (2017R1A2B3009135), and the Nano Material Technology Development Program (2016M3A7B4910) through the National Research Foundation of Korea (NRF). This work was also partly supported by the Technology development Program (S2939998) of the Ministry of SMEs and Startups (MSS, Korea) and performed, in part, at the Center for Integrated Nanotechnologies, an Office of Science User Facility operated for the U.S. Department of Energy (DOE) Office of Science. Los Alamos National Laboratory, an affirmative action equal opportunity employer, is managed by Triad National Security, LLC for the U.S. Department of Energy's NNSA, under contract 9233218CNA000001. Publisher Copyright: {\textcopyright} 2020 Wiley-VCH GmbH",

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AU - Choi, Yong Seok

AU - Moon, Joonhee

AU - Park, Seo Yun

AU - Lee, Tae Hyung

AU - Park, Hoon Kee

AU - Lee, Sol A.

AU - Kwon, Min Sang

AU - Byun, Hyung Gi

AU - Lee, Jong Heun

AU - Lee, Myoung Gyu

AU - Hong, Byung Hee

AU - Jang, Ho Won

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N2 - 2D materials, such as graphene, exhibit great potential as functional materials for numerous novel applications due to their excellent properties. The grafting of conventional micropatterning techniques on new types of electronic devices is required to fully utilize the unique nature of graphene. However, the conventional lithography and polymer-supported transfer methods often induce the contamination and damage of the graphene surface due to polymer residues and harsh wet-transfer conditions. Herein, a novel strategy to obtain micropatterned graphene on polymer substrates using a direct curing process is demonstrated. Employing this method, entirely flexible, transparent, well-defined self-activated graphene sensor arrays, capable of gas discrimination without external heating, are fabricated on 4 in. wafer-scale substrates. Finite element method simulations show the potential of this patterning technique to maximize the performance of the sensor devices when the active channels of the 2D material are suspended and nanoscaled. This study contributes considerably to the development of flexible functional electronic devices based on 2D materials.

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Tailored Graphene Micropatterns by Wafer-Scale Direct Transfer for Flexible Chemical Sensor Platform

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

Access to Document

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