Abstract
To address the inherent brittleness of conventional transparent conductive oxides, researchers have focused on enhancing their flexibility. This is achieved by incorporating organic films to construct organic-inorganic hybrid layer-by-layer nanostructures, where the interlayer thickness and interface play pivotal roles in determining the properties. These factors are contingent on the type of material, processing conditions, and specific application requirements, making it essential to select the appropriate conditions. In this study, ZnO-zincone nanolaminate thin films were fabricated using atomic layer deposition and molecular layer deposition in various structural configurations. Transmission electron microscopy, X-ray diffraction, and scanning electron microscopy were used to conduct a thorough analysis of the thin-film growth and structural transformations resulting from the deposition conditions. Furthermore, the influence of structural differences at the interfaces on the mechanical properties of the films was investigated by employing both tensile and compression-bending fatigue tests. This comprehensive examination reveals noteworthy variations in the mechanical responses of the films. Thin films characterized by internal porosity and an intermixed amorphous structure demonstrated enhanced compressive toughness, whereas rigid organic layers improved flexibility. These findings offer valuable insights into the development of flexible, transparent multilayer films.
Original language | English |
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Pages (from-to) | 31543-31554 |
Number of pages | 12 |
Journal | ACS Applied Materials and Interfaces |
Volume | 16 |
Issue number | 24 |
DOIs | |
Publication status | Published - 2024 Jun 19 |
Bibliographical note
Publisher Copyright:© 2024 American Chemical Society.
Keywords
- atomic layer deposition
- flexible electrode
- molecular layer deposition
- nanolaminate
- organic−inorganic hybrids
- reliability
ASJC Scopus subject areas
- General Materials Science