@inproceedings{ab4ccee9df4b4953b4ceb07b290a5ae0,
title = "Technology development of silicon based CMOS tactile senor for robotics applications",
abstract = "This paper describes the design, manufacture and measure of tactile sensor with piezoresistive detection of deflection. The tactile sensor array was constructed with a fully integrated complementary metal oxide semiconductor (CMOS) fabrication process and bulk micromachining for the sensing structures. Electrical connections were made between the flexible printed circuit boards (FPCB) and the sensor array module using an anisotropic conductive film (ACF) bonding. The individual sensor element has been shown to demonstrate linear responses to applied normal stress (117mV/N). Therefore, this approach could yield a highly sensitive tactile sensor array for use in dexterous robotic applications.",
author = "Kim, {Yong Kook} and Kunnyun Kim and Lee, {Kang Ryeol} and Cho, {Woo Sung} and Lee, {Dae Sung} and Kim, {Won Hyo} and Cho, {Nam Kyu} and Park, {Kwang Bum} and Park, {Hyo Derk} and Park, {Jung Ho} and Ju, {Byeong Kwon}",
year = "2006",
doi = "10.1109/ICSENS.2007.355573",
language = "English",
isbn = "1424403766",
series = "Proceedings of IEEE Sensors",
pages = "734--737",
booktitle = "2006 5th IEEE Conference on Sensors",
note = "2006 5th IEEE Conference on Sensors ; Conference date: 22-10-2006 Through 25-10-2006",
}