Technology development of silicon based CMOS tactile senor for robotics applications

Keyphrases

• Silicon-based 100%
• Technology Development 100%
• Complementary Metal Oxide Semiconductor 100%
• Robotic Applications 100%
• Tactile Sensor Array 100%
• Senor 100%
• Sensor Array 50%
• Highly Sensitive 50%
• Electrical Connection 50%
• Bulk Micromachining 50%
• Linear Response 50%
• Deflection 50%
• Flexible Printed Circuit Board 50%
• Fully Integrated 50%
• Tactile Sensor 50%
• Semiconductor Fabrication Process 50%
• Array Module 50%
• Anisotropic Conductive Film 50%
• Sensor Element 50%
• Piezoresistive Detection 50%
• Sensing Structure 50%
• Normal Stress 50%

Engineering

• Sensor Array 100%
• Complementary Metal-Oxide-Semiconductor 100%
• Robotics Application 100%
• Technological Development 100%
• Electrical Connection 33%
• Micro Machining 33%
• Flexible Printed Circuit Board 33%
• Linear Response 33%
• Semiconductor Fabrication 33%
• Anisotropic Conductive Film 33%
• Individual Sensor 33%

Material Science

• Silicon 100%
• Complementary Metal-Oxide-Semiconductor Device 100%
• Electronic Circuit 50%
• Micromachining 50%
• Conductive Film 50%