Terahertz Nanoscopy for Semiconductor Metrology

Taehee Kang; Minah Seo; Yeonjoo Lee; Jinkyoung Yoo

doi:10.1007/978-3-031-86647-0_2

Terahertz Nanoscopy for Semiconductor Metrology

Taehee Kang
, Minah Seo
, Yeonjoo Lee
, Jinkyoung Yoo^*

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Abstract

THz metrologyMetrology is suitable for semiconductor metrology because it enables nondestructive and subsurface imaging. Enhancement of spatial resolution is a key demand for THz metrologyMetrology in semiconductor manufacturing. THz nanoscopyNanoscopy is a way to accomplish high spatial resolution and quantitative analysis via overcoming the diffraction limit. Nanoscale antenna technique has been employed to enhance and localize THz signal. The antenna-based signal enhancement has been applied to various disciplines, such as condensed matter physics, biology, and metrologyMetrology. Progress and perspective in THz nanoscopyNanoscopy will be discussed.

Original language	English
Title of host publication	Topics in Applied Physics
Publisher	Springer Science and Business Media Deutschland GmbH
Pages	41-59
Number of pages	19
DOIs	https://doi.org/10.1007/978-3-031-86647-0_2
Publication status	Published - 2025
Externally published	Yes

Publication series

Name	Topics in Applied Physics
Volume	153
ISSN (Print)	0303-4216
ISSN (Electronic)	1437-0859

Bibliographical note

Publisher Copyright:
© The Author(s), under exclusive license to Springer Nature Switzerland AG 2025.

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

Access to Document

10.1007/978-3-031-86647-0_2

Cite this

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title = "Terahertz Nanoscopy for Semiconductor Metrology",

abstract = "THz metrologyMetrology is suitable for semiconductor metrology because it enables nondestructive and subsurface imaging. Enhancement of spatial resolution is a key demand for THz metrologyMetrology in semiconductor manufacturing. THz nanoscopyNanoscopy is a way to accomplish high spatial resolution and quantitative analysis via overcoming the diffraction limit. Nanoscale antenna technique has been employed to enhance and localize THz signal. The antenna-based signal enhancement has been applied to various disciplines, such as condensed matter physics, biology, and metrologyMetrology. Progress and perspective in THz nanoscopyNanoscopy will be discussed.",

author = "Taehee Kang and Minah Seo and Yeonjoo Lee and Jinkyoung Yoo",

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year = "2025",

doi = "10.1007/978-3-031-86647-0\_2",

language = "English",

series = "Topics in Applied Physics",

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T1 - Terahertz Nanoscopy for Semiconductor Metrology

AU - Kang, Taehee

AU - Seo, Minah

AU - Lee, Yeonjoo

AU - Yoo, Jinkyoung

PY - 2025

Y1 - 2025

N2 - THz metrologyMetrology is suitable for semiconductor metrology because it enables nondestructive and subsurface imaging. Enhancement of spatial resolution is a key demand for THz metrologyMetrology in semiconductor manufacturing. THz nanoscopyNanoscopy is a way to accomplish high spatial resolution and quantitative analysis via overcoming the diffraction limit. Nanoscale antenna technique has been employed to enhance and localize THz signal. The antenna-based signal enhancement has been applied to various disciplines, such as condensed matter physics, biology, and metrologyMetrology. Progress and perspective in THz nanoscopyNanoscopy will be discussed.

AB - THz metrologyMetrology is suitable for semiconductor metrology because it enables nondestructive and subsurface imaging. Enhancement of spatial resolution is a key demand for THz metrologyMetrology in semiconductor manufacturing. THz nanoscopyNanoscopy is a way to accomplish high spatial resolution and quantitative analysis via overcoming the diffraction limit. Nanoscale antenna technique has been employed to enhance and localize THz signal. The antenna-based signal enhancement has been applied to various disciplines, such as condensed matter physics, biology, and metrologyMetrology. Progress and perspective in THz nanoscopyNanoscopy will be discussed.

UR - https://www.scopus.com/pages/publications/105013506672

U2 - 10.1007/978-3-031-86647-0_2

DO - 10.1007/978-3-031-86647-0_2

M3 - Chapter

AN - SCOPUS:105013506672

T3 - Topics in Applied Physics

SP - 41

EP - 59

BT - Topics in Applied Physics

PB - Springer Science and Business Media Deutschland GmbH

ER -

Terahertz Nanoscopy for Semiconductor Metrology

Abstract

Publication series

Bibliographical note

ASJC Scopus subject areas

Access to Document

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