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Terahertz Nanoscopy for Semiconductor Metrology
Taehee Kang
, Minah Seo
, Yeonjoo Lee
, Jinkyoung Yoo
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Corresponding author for this work
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Keyphrases
Terahertz
100%
Nanoscopy
100%
Semiconductor Metrology
100%
Spatial Resolution
50%
High Spatial Resolution
50%
Antenna
50%
Signal Enhancement
50%
Subsurface Imaging
50%
Diffraction Limit
50%
Semiconductor Manufacturing
50%
Condensed Matter Physics
50%
Nanopatch Antenna
50%
THz Signal
50%
Non-destructive Imaging
50%
Engineering
Spatial Resolution
100%
Terahertz
100%
Antenna
50%
Nanoscale
50%
Subsurface
50%
Semiconductor Manufacturing
50%
Diffraction Limit
50%
Antenna Technique
50%
Physics
Antenna
100%
Nanoscale
50%
Condensed Matter Physics
50%
Medicine and Dentistry
Diffraction
100%