Textured Pb(Zr,Ti)O3-Pb[(Zn,Ni)1/3Nb2/3]O3 multilayer ceramics and their application to piezoelectric actuators

Eun Ji Kim, Tae Gon Lee, Dae Su Kim, Sun Woo Kim, Yeon Jeong Yee, Seung Ho Han, Hyung Won Kang, Sahn Nahm

    Research output: Contribution to journalArticlepeer-review

    31 Citations (Scopus)

    Abstract

    0.69Pb(Zr0.47Ti0.53)-0.31Pb[(Zn0.4Ni0.6)1/3Nb2/3]O3 (PZT-PZNN) thick films were textured at 950°C along the [001] direction using BaTiO3 (BT) platelets. The 80Ag/20Pd electrodes coated on the PZT-PZNN thick films considerably assisted the texturing of the thick film. PZT-PZNN thick films with 5 vol% BT seeds exhibited a large strain (0.33% at 4.0 kV/mm) and d33* (1,040 pm/V at 1.5 kV/mm). Because the variations in d33* and strain of the PZT-PZNN thick films were not explained by Rayleigh's law, the experimental formula, which fits the measured d33* and strain, was suggested. Multilayer ceramics (MLCs) comprising five layers of textured PZT-PZNN thick films were fabricated at 950°C. Cantilever-type actuators produced by textured PZT-PZNN MLCs exhibited a large acceleration (46.9 G) and displacement (10.5 mm) at 50 V, which were much larger than those (32.6 G and 7 mm) of the actuators produced by untextured MLCs. Therefore, textured piezoelectric thick film can considerably improve the actuating properties of piezoelectric actuators.

    Original languageEnglish
    Article number100695
    JournalApplied Materials Today
    Volume20
    DOIs
    Publication statusPublished - 2020 Sept

    Bibliographical note

    Funding Information:
    This research was supported by the National Research Council of Science & Technology (NST) grant by the Korean government (MSIP; No. CAP-17-04-KRISS ) and the authors also thank the KU-KIST Graduate School Program of Korea University.

    Publisher Copyright:
    © 2020

    Keywords

    • Actuator
    • Low temperature sintering
    • Multilayer
    • Strain equation
    • Textured piezoelectric ceramic

    ASJC Scopus subject areas

    • General Materials Science

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