@article{0d93f329daeb467ea120cdc4db2c6460,
title = "The 10th Asia-Pacific conference on Plasma Science and Technology (APCPST 2010): The 153rd symposium on Plasma Science for Materials (SPSM 2010)",
author = "Chae, \{H. Y.\} and Chung, \{Chin Wook\} and Chung, \{J. W.\} and Hong, \{M. P.\} and Joo, \{J. H.\} and Kim, \{H. J.\} and Kim, \{D. H.\} and E. Kusano and L. Overzet and Pu, \{Yi Kang\} and Y. Setsuhara and Shi, \{J. J.\} and K. Terashima and T. Watanabe",
note = "Copyright: Copyright 2011 Elsevier B.V., All rights reserved.",
year = "2011",
month = aug,
day = "1",
doi = "10.1016/j.tsf.2011.06.001",
language = "English",
volume = "519",
pages = "6637--6638",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier B.V.",
number = "20",
}