The effects of nitrogen bonding on hardness of AlN/CrN multilayer hard coatings

Sang Won Yoon, Jong Hyun Seo, Keun Hwa Chae, Jong Keuk Park, Jong Han Song, Vickram Jayaram, Kon Bae Lee, Tae Yeon Seong, Hoon-Kwon, Jae Pyoung Ahn

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5 Citations (Scopus)


AlN/CrN multilayer hard coatings with various bilayer thicknesses were fabricated by a reactive sputtering process. The microstructural and mechanical characterizations of multilayer coatings were investigated through transmission electron microscope (TEM) observations and the hardness measurements by nano indentation. In particular, the variation of chemical bonding states of the bilayer nitrides was elucidated by near edge X-ray absorption fine structure (NEXAFS) spectroscopy. Many broken nitrogen bonds were formed by decreasing the bilayer thickness of AlN/CrN multilayer coatings. Existence of optimum AlN/CrN multilayer coatings thickness for maximum hardness could be explained by the competition of softening by the formation of broken nitrogen bonds and strengthening induced by decreasing bilayer thickness.

Original languageEnglish
Pages (from-to)1476-1479
Number of pages4
JournalJournal of Nanoscience and Nanotechnology
Issue number2
Publication statusPublished - 2012


  • AlN/CrN
  • Bilayer Thickness
  • Broken Nitrogen Bond
  • Multilayer Hard Coating

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Biomedical Engineering
  • Materials Science(all)
  • Condensed Matter Physics


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